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Array substrate and preparation method thereof

An array substrate and substrate technology, which is applied to electrical components, electrical solid-state devices, circuits, etc., can solve problems such as the inability to release charge accumulation and affecting the yield of array substrate products.

Inactive Publication Date: 2019-05-07
HEFEI XINSHENG OPTOELECTRONICS TECH CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] In the prior art, in the preparation stage of the array substrate, the layers of conductive structures are mostly insulated from each other, and the accumulated charges in the conductive structures of each layer cannot be released, which leads to the phenomenon of ESD (Electro-Static discharge; electrostatic discharge) , will affect the product yield of the array substrate

Method used

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  • Array substrate and preparation method thereof
  • Array substrate and preparation method thereof

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Embodiment 1

[0054] Such as Figure 1 to Figure 6 As shown, this embodiment provides a method for manufacturing an array substrate, including: forming a multi-layer conductive layer on the substrate.

[0055] Wherein, the step of forming each conductive layer may include: forming a pattern including a conductive pattern and an antistatic pattern through a patterning process, the conductive pattern is electrically connected to the antistatic pattern, and the antistatic patterns in different layers are electrically connected.

[0056] That is, in this embodiment, each conductive layer includes a conductive pattern and an antistatic pattern. Wherein, the conductive patterns in different conductive layers may respectively be gates, sources, drains, pixel electrodes, common electrodes and other structures of thin film transistors.

[0057] In this embodiment, when preparing the array substrate, the conductive patterns in the same conductive layer are electrically connected to the antistatic pa...

Embodiment 2

[0092] Such as Figure 7-12 As shown, this embodiment provides a method for preparing an array substrate, which is basically the same as the method for preparing the array substrate provided in Embodiment 1.

[0093] Particularly, in this embodiment, at least part of the conductive layer of the array substrate includes a plurality of conductive patterns, and the plurality of conductive patterns are electrically connected to the antistatic pattern in the same conductive layer. Specifically, in this embodiment, the first conductive layer includes a plurality of first conductive patterns 11, and the first conductive pattern 11 is a gate, and the third conductive layer includes a plurality of third conductive patterns 31, and the third conductive pattern The pattern 31 will be described as an example of a source and a drain.

[0094] The preparation method of the present embodiment also includes the following steps on the basis of Example 1:

[0095] S21, such as Figure 6 As s...

Embodiment 3

[0117] This embodiment provides an array substrate, which can be prepared according to the preparation method provided in Embodiment 1 or Embodiment 2. The array substrate includes: a base and multiple conductive layers arranged on the base; each conductive layer includes a conductive pattern and an antistatic pattern, and the conductive pattern is electrically connected to the antistatic pattern; the antistatic patterns in different layers are electrically connected.

[0118] Since the array substrate provided in this embodiment is not prone to electrostatic discharge during the preparation process, the array substrate has a higher yield rate and better performance.

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Abstract

The invention provides an array substrate and a preparation method thereof, and belongs to the technical field of display. The preparation method comprises that multiple conductive layers are formed on the substrate; each conductive layer is formed by that a pattern including a conductive pattern and an anti-static pattern is formed via a composition technology, and the conductive pattern is electrically connected with the anti-static pattern; and the anti-static patterns in different layers are electrically connected.

Description

technical field [0001] The invention belongs to the field of display technology, and in particular relates to a method for preparing an array substrate and the array substrate. Background technique [0002] The array substrate is an important part of the display device, and the array substrate generally includes a base substrate and a multi-layer conductive structure formed on the base substrate. [0003] In the prior art, in the preparation stage of the array substrate, the layers of conductive structures are mostly insulated from each other, and the accumulated charges in the conductive structures of each layer cannot be released, which leads to the phenomenon of ESD (Electro-Static discharge; electrostatic discharge) , will affect the product yield of the array substrate. Contents of the invention [0004] The purpose of the present invention is to solve at least one of the technical problems in the prior art, and to provide a method for preparing an array substrate th...

Claims

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Application Information

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IPC IPC(8): H01L27/02
Inventor 唐新阳韩领郝朝威孙学超陈彦波
Owner HEFEI XINSHENG OPTOELECTRONICS TECH CO LTD
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