Capacitive fibroin humidity sensor and preparation method thereof

A humidity sensor and silk protein technology, applied in the direction of material capacitance, etc., can solve the problems of process-limited device integration, complex circuits, and low sensitivity, and achieve good humidity response, good biocompatibility, and high material utilization. Effect

Active Publication Date: 2019-05-21
XI AN JIAOTONG UNIV
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Problems solved by technology

[0003] Respiratory monitors based on chest wall deformation are generally large in size and complex in circuit, so the relative manufacturing cost is relatively high, and it is very uncomfortable to wear; the humidity sensor that uses the humidity of the exhaled gas to monitor the respiratory rate can be divided into resistive type humidity sensor and Capacitive humidity sensor, resistive humidity sensor usually responds slowly, has low sensitivity and the measurement data is greatly affected by temperature changes; It affects the capacitance value, has the advantages of fast response speed, high sensitivity, and work is not affected by temperature changes. The commonly used moi

Method used

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  • Capacitive fibroin humidity sensor and preparation method thereof
  • Capacitive fibroin humidity sensor and preparation method thereof
  • Capacitive fibroin humidity sensor and preparation method thereof

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preparation example Construction

[0028] refer to figure 1 , the preparation method of the capacitive silk protein humidity sensor of the present invention comprises the following steps:

[0029] 1) On the substrate 11, the silver nanowire film 12 and the photoresist film 13 are sequentially scraped and coated on the substrate 11, and then a mask pattern covering the interdigitated electrode area is prepared by a photolithography process to obtain a patterned substrate 11;

[0030] 2) Treating the patterned substrate 11 obtained in step 1) with plasma oxygen to oxidize and insulate the non-electrode region, and then remove the glue to obtain a conductive interdigitated electrode region and an insulating non-electrode region;

[0031] 3) Scrape the silk protein solution on the conductive interdigitated electrode area and the insulating non-electrode area by scraper coating, air-dry to obtain the silk protein moisture-sensitive film 17, and then place it in an anhydrous ethanol solution to treat the silk protei...

Embodiment 1

[0034] The preparation method of the capacitive silk protein humidity sensor of the present invention comprises the following steps:

[0035] 1) Select flexible substrates, such as dielectric polymers such as polyethylene terephthalate (PET), polyimide (PI) or polyvinylidene fluoride (PVDF), or inorganic substrates such as glass and silicon wafers. For the dielectric material, PET plastic with a thickness of 300 μm is used in this embodiment, and the substrate is ultrasonically cleaned with ethanol and deionized water for 10 minutes, and then dried with an infrared lamp to obtain the substrate 11;

[0036] 2) Scrape-coat the silver nanowire film 12 on the substrate 11 using a doctor blade coater, the distance between the scraper and the substrate 11 is 200 μm, and the scraping speed is 15 mm / min, and the silver nanowire solution used is a dispersion system with deionized water, And the concentration is 10mg / ml, the diameter of silver nanowires is about 100nm, and the length is...

Embodiment 2

[0044] The preparation method of the capacitive silk protein humidity sensor of the present invention comprises the following steps:

[0045] 1) A polyethylene terephthalate film with a size of 10cm×10cm was ultrasonically cleaned with ethanol and deionized water for 10 minutes, and then dried with an infrared lamp to obtain the substrate 11;

[0046] 2) Use a knife coater to evenly coat a layer of silver nanowire thin film 12 on the substrate 11. Specifically, 10 wt % silver nanowire dispersion liquid with a diameter of 50 nm is dropped on the scraper. 15 mm / s, and the height of the scraper is 200 μm, so that the silver nanowire dispersion is evenly coated on the substrate 11. After the scraping is completed, the sample is placed on a heating table at 120° C. for half an hour for heating and curing, and then cooled to room temperature to obtain silver. nanowire film 12;

[0047] 3) Use a scraper coater to uniformly coat a layer of photoresist on the substrate 11 obtained in ...

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Abstract

The invention discloses a capacitive fibroin humidity sensor and a preparation method thereof. The capacitive fibroin humidity sensor comprises a fibroin humidity sensing layer, a silver nanowire interdigital electrode and a substrate which are sequentially distributed from top to bottom. The humidity sensor has high sensitivity and fast response time to humidity change and can be directly attached to the nose to simultaneously monitor the respiratory frequency and intensity of a human body.

Description

technical field [0001] The invention relates to a humidity sensor and a preparation method thereof, in particular to a capacitive silk protein humidity sensor and a preparation method thereof. Background technique [0002] Wearable sensors can provide real-time and accurate vital sign monitoring information, which is the development trend of a new generation of medical devices. Wearable breathing monitoring devices could aid in the diagnosis and ongoing treatment of a large number of people suffering from neurological, cardiovascular and pulmonary conditions such as seizures, high blood pressure, malformations and asthma. Existing wearable respiratory monitoring devices mainly include chest-worn type based on chest wall movement and face-worn type based on local humidity changes caused by exhaled gas. [0003] Respiratory monitors based on chest wall deformation are generally large in size and complex in circuit, so the relative manufacturing cost is relatively high, and it...

Claims

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Application Information

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IPC IPC(8): G01N27/22
Inventor 罗钰裴跃琛冯学明张浩王莉
Owner XI AN JIAOTONG UNIV
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