Micro-nano precision measurement displacement sensor and system and preparation method

Abstract

The invention discloses a micro-nano precision measurement displacement sensor, which comprises a compliant mechanism with reverse gain, a displacement measurement electrode and a sensor housing usedfor integral packaging, wherein the compliant mechanism is connected to the sensor housing by adopting an integrated processing and molding technology, the head end of the compliant mechanism is provided with a measured displacement contact input terminal, the tail end of the compliant mechanism is provided with an output terminal motion electrode; the displacement measurement electrode includes afirst electrode, a second electrode, a third electrode and a fourth electrode, the first electrode and the second electrode are respectively arranged above and below the left end of the motion electrode, the third electrode and the fourth electrode are respectively arranged above and below the right end of the motion electrode, the first electrode, the second electrode, the third electrode and the fourth electrode are fixedly connected to the sensor housing, the motion electrode forms two differential displacement measurement circuit respectively with the first and second electrode and the third and fourth electrodes, and the micro-nano displacement measurement is realized through an external reading and processing circuit.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a displacement sensor for micro-nano precision measurement. Background technique [0002] Displacement sensors can be divided into various types according to different measurement principles. Among them, capacitive displacement sensors are widely used in the displacement measurement of institutions; traditional capacitive sensors can achieve accurate displacement measurement by adjusting the installation and arrangement of electrodes; but For the measurement of micro-nano displacement, the traditional capacitive sensor cannot measure the displacement at the micro-nano level due to the large accuracy error. And it also poses great challenges to the circuit design. Contents of the invention [0003] The invention provides a micro-nano precision measuring displacement sensor, system and preparation method to solve the technical problem that traditional sensors cannot accurately m...

AI Technical Summary

Problems solved by technology

[0003] The invention provides a micro-nano precision displacement sensor, system and preparation method to solve the technical problem that the traditional sensor cannot accurately measure the micro-nano displacement, so as to realize the precise measurement of the micro-nano level displacement

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