High-sensitivity automatic optical detection method and device

An automatic optical detection and high-sensitivity technology, which is applied in the direction of optical testing of flaws/defects, material analysis through optical means, and measuring devices, etc. It can solve problems such as film color differences and complex manufacturing processes, achieve high sensitivity, and improve image capture efficiency , Efficient and flexible detection and analysis

Inactive Publication Date: 2019-08-16
武汉中导光电设备有限公司
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Problems solved by technology

[0005] The purpose of the present invention is to provide a high-sensitivity automatic optical detection method and equipment in order to overcome the deficiencies in the prior art for complex defects such as complex manufacturing process, film color difference, light-dark difference, polarization difference, and high-sensitivity defect detection

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  • High-sensitivity automatic optical detection method and device
  • High-sensitivity automatic optical detection method and device

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[0068] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0069] see figure 1 , figure 2 , Figure 4 and Figure 5 As shown, the first aspect of the embodiment of the present invention provides a high-sensitivity automatic optical detection method, which includes the following steps:

[0070] Step 1: According to the set imaging sequence of various imaging modes, the camera 301 continuously moves and shoots on the flat sample 201 according to the preset motion trajectory, and collects images of various imaging modes of the flat sample 201. The motion trajectory is based on actual needs and the specific shape of the flat sample 201; and there is a partial overlapping area between two adjacent images of the same imaging mode, of course, there is also an overlapping area between images of multiple imaging modes in one scan, and there is no need to reverse Direction The flat sample 201 is p...

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Abstract

The invention discloses a high-sensitivity automatic optical detection method and device, and belongs to the technical field of optical detection. The high-sensitivity automatic optical detection method comprises the following steps of firstly, continuously moving and shooting flat plate samples according to a set imaging sequence of various imaging modes; secondly, repeating the above steps untilthe images of the flat plate samples in various imaging modes are shot; and finally, enabling the images of the same imaging mode to be spliced into a complete flat plate sample full image through analgorithm, and meanwhile, obtaining a detection result through a defect detection and analysis tool. According to the method, images of various imaging modes can be obtained in one-time scanning, thecamera can quickly shoot images of various imaging modes in a non-stop state, and sample images with different imaging modes can be obtained. In addition, the invention also provides the high-sensitivity automatic optical detection method to realize automatic focusing of the camera, so that it is ensured that a high-quality image can be constanly obtained in the imaging process.

Description

technical field [0001] The invention relates to the technical field of flat sample defect detection, in particular to a high-sensitivity automatic optical detection method and equipment. Background technique [0002] Automatic optical inspection (AOI) equipment is a key equipment for the manufacture of flat panel and semiconductor integrated circuits and chips. It is used to diagnose and improve product quality in the manufacturing process and reduce manufacturing costs. Detection sensitivity, stability and the types of defects that can be detected are the key technical indicators of automatic optical inspection equipment. With the application of new technologies and the advancement of technological levels, more and more complex manufacturing processes have higher and higher requirements for detection sensitivity and variety of detection types. At the same time, in order to increase production, the detection time of equipment is also an important technical indicator. [000...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/88
CPCG01N21/88G01N21/8806
Inventor 李波王建存张国栋
Owner 武汉中导光电设备有限公司
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