This invention relates to the field of
semiconductor detection technology and discloses a
mass spectrometry device with a variable configuration energy analyzer and its control method. By coordinating a variable slit mechanism, an
electrode system, and a
mode switching controller, this invention enables the same
mass spectrometry device to flexibly switch between two operating
modes: wide energy acquisition and high sensitivity, and narrow
passband and
high energy resolution. This resolves the contradiction that existing fixed-parameter energy analyzers cannot simultaneously meet the needs of different analytical tasks. Through pre-storing target operating mode parameter sets and a parallel control strategy, parameters for all operating
modes are pre-calculated and calibrated, and can be directly recalled during
mode switching without real-time calculation. Simultaneously, the
slit width, the output
voltage of each
electrode, and the operating status of the
ion source components are adjusted, effectively reducing the
mode switching time and ensuring that the
switching time is controlled within a set time, meeting the requirements for online real-
time switching during process operations.