Sample holder for X-ray photoelectron spectroscopy in-situ test and application thereof
A technology of photoelectron spectroscopy and in-situ testing, which is applied in the field of photoelectron spectroscopy analysis and testing, and can solve problems such as unable to output stable sample voltage or current
Active Publication Date: 2019-08-16
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI +1
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Problems solved by technology
[0005] The purpose of the present invention is to provide a sample holder for in-situ testing of X-ray photoelectron spectroscopy and its application, so as to solve the problem that the sample holder in the prior art cannot stabilize the voltage or current of the sample under high temperature and certain atmosphere conditions. output and satisfy the four-probe test requirements simultaneously
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[0029] The present invention will be further described below in conjunction with specific embodiments. It should be understood that the following examples are only used to illustrate the present invention but not to limit the scope of the present invention.
[0030] Such as Figure 1-Figure 2 Shown is a sample holder according to a preferred embodiment of the present invention, which is used for in-situ testing of X-ray photoelectron spectroscopy. The sample holder mainly includes: a base 1, an electrode substrate 2, an electrode probe 3, and a sample placement table 4 and an insulating bearing 5; wherein, the base 1 has a ring-shaped structure, including: an annular upper surface 11 and an annular outer sidewall 12 extending downward along the outer peripheral edge of the annular upper surface 11; the electrode substrate 2 is fixed on the annular ring of the base 1 Above the upper surface 11; one end of the electrode probe 3 is fixed on the electrode substrate 2, and the oth...
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Abstract
The present invention provides a sample holder for X-ray photoelectron spectroscopy in-situ test and an application thereof. The sample holder comprises a base, an electrode substrate, an electrode probe, a sample placement table and an insulating bearing. The base is of a circular structure; the electrode substrate is fixed above the base; the sample placement table is arranged on the inside of the base and includes a sample heating lining; one end of the electrode probe is fixed on the electrode substrate and the other end extends onto the sample placement table; and the insulating bearing is arranged between the base and the sample placement table. One end of the electrode probe can be connected with a wire, which physically contacts with the electrode probe and a sample to form a loop;simultaneously voltage and current signals are input and output; the intensity of the applied voltage and current is controlled by an external instrument; and the X-ray photoelectron spectroscopy in-situ test is realized. The sample holder provided by the invention can be used for the X-ray photoelectron spectroscopy in-situ test of specific samples under the conditions of a high temperature, a certain atmosphere and pressure and applied voltage or current.
Description
technical field [0001] The invention relates to the technical field of photoelectron spectroscopy analysis and testing, in particular to a sample holder for in-situ testing of X-ray photoelectron spectroscopy and its application. Background technique [0002] X-ray photoelectron spectroscopy is an important means of surface analysis. The main theoretical basis of this technology is the photoelectric effect, that is, when X-rays irradiate the surface of the sample, the photons can excite the electrons in the atomic orbital of a certain element in the sample, so that the electrons can break away from the shackles of the nucleus and pass through the sample surface with a certain kinetic energy. , into free photoelectrons. Photoelectrons can be detected by the energy analyzer of the system. The analyzer records and counts the number of electrons with different kinetic energies, and then the binding energy information of the electrons can be obtained, which reflects the elementa...
Claims
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IPC IPC(8): G01N23/2204G01N23/2273
CPCG01N23/2204G01N23/2273
Inventor 董乔刘志余毅毛宝华蔡军韩永
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI