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In-situ monitoring method for damage of intensively-arrangement large-caliber optical elements

An optical element and large-aperture technology, which is used in optical testing for flaws/defects, material analysis by optical means, and measuring devices. It can solve problems such as the inability to identify large-diameter optical elements concisely and efficiently, and achieve novel ideas and clever designs. , easy to achieve effect

Active Publication Date: 2019-08-23
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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Problems solved by technology

[0006] In order to solve the technical problem that the existing in-situ monitoring method cannot identify the damage of large-diameter optical components simply and efficiently, the present invention provides a method for in-situ monitoring of damage to densely arranged large-diameter optical components

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  • In-situ monitoring method for damage of intensively-arrangement large-caliber optical elements
  • In-situ monitoring method for damage of intensively-arrangement large-caliber optical elements
  • In-situ monitoring method for damage of intensively-arrangement large-caliber optical elements

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Embodiment Construction

[0031] The present invention will be further described below in conjunction with embodiment and accompanying drawing.

[0032] Such as Figure 1-Figure 3 As shown, a method for in-situ monitoring of damage to densely arranged large-aperture optical elements is carried out according to the following steps:

[0033] S1: Embedding each large-aperture optical element 5 into its respective mounting and clamping frame 1, making the outer edge of the large-diameter optical element 5 abut against the slit diaphragm 3 located inside the corresponding mounting and clamping frame 1, and The slit 3 a of the slit diaphragm 3 is facing the outer edge of the large-aperture optical element 5 .

[0034] In this embodiment, the inner wall of the installation and clamping frame 1 is recessed to form a circle of line light source installation grooves 1a extending along the circumference of the installation and clamping frame 1. The line light source 2 extending in the circumferential direction ...

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Abstract

The invention discloses an in-situ monitoring method for damage of intensively-arrangement large-caliber optical elements. The method is carried out according to the following steps that S1, the large-caliber optical elements are embedded into corresponding mounting clamping frames respectively; S2, light shielding strips are arranged on each large-caliber optical element; S3, the mounting clamping frames are arranged in a high-power laser device at equal intervals in the front-back direction; S4, when the damage situation of any large-caliber optical element needs to be monitored in situ, a line light source of the large-caliber optical element is opened, and the line light sources of the other large-caliber optical elements are closed; and S5, a dark field image of the large-caliber optical element is collected by utilizing an image acquisition device. By the adoption of the method, the capability of obtaining the high-quality element damage image without pseudo damage is achieved byeliminating the interference of the adjacent element, the damage of the large-caliber optical elements can be subjected to in-situ online monitoring visually, and the damage size and distribution position information can be conveniently and efficiently obtained.

Description

technical field [0001] The invention relates to the technical field of optical element detection, in particular to a method for in-situ monitoring damage of densely arranged large-diameter optical elements. Background technique [0002] For high-power laser devices, although new anti-laser damage optical materials and processing technologies are continuously developed, driven by economic and technological factors, laser designers continue to increase the operating power of the system to these new materials and new processes. In order to achieve the goal of obtaining higher output energy at a certain cost. One of the most serious challenges faced by high-power laser devices operating near or above the damage threshold of optical components is the problem of laser-induced damage of optical components. Their rapid size growth leads to component scrapping, which greatly restricts the economical and stable operation of high-power laser devices. [0003] In view of the special o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/95G01N21/958
CPCG01N21/95G01N21/958G01N2021/9511G01N2021/9583
Inventor 张传超王海军张丽娟蒋晓龙陈静方振华廖威栾晓雨蒋晓东
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS