EMCCD unit model library design method suitable for simulation and inspection

Abstract

The invention discloses an EMCCD unit model library design method suitable for simulation and inspection. According to the present invention, the model library design is performed on the basis of thephysical basic principle of a semiconductor device, research analysis is performed in combination with a numerical analysis method, the corresponding circuit symbols are analyzed by simplifying and approximating the structure, and the simulation verification is performed by adopting a fully-customized chip design tool and a circuit simulation program. According to the method, the two-dimensional profile and the three-dimensional structure of the EMCCD unit only suitable for a numerical analysis method are approximately simplified through key parameters such as EMCCD medium characteristics, impurity distribution and electrode morphology; the representation symbols of typical active devices, passive devices and customized devices are abstracted, the method is used for carrying out circuit function analysis, circuit layout comparison and design rule inspection on a fully-customized chip design tool and a circuit analog simulation program, optimizing an EMCCD design flow, improving the EMCCD design efficiency and improving the EMCCD layout design accuracy and reliability.

Description

Technical field [0001] The invention relates to an EMCCD unit model library design method, in particular to an EMCCD unit model library design method suitable for simulation and inspection. Background technique [0002] The EMCCD realizes the function of multiplying the signal charge inside the CCD by setting a multi-level controllable avalanche gain multiplication shift register unit in the horizontal shift register. The problem is: the existing EMCCD design method starts from the cell layout design, and uses a bottom-up design method to build and design the photosensitive area, vertical shift register, horizontal shift register, multiplying shift register, and charge. Detection and follower amplifiers, etc., because this design method cannot be intuitive, accurate, and efficient, and is not suitable for top-level structure function simulation analysis, circuit layout control check and design rule check, it will have a certain impact on the efficiency and reliability of EMCCD de...

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Problems solved by technology

[0003] In view of the problems in the background technology, in order to overcome the current EMCCD design process, because of the lack of corresponding circuit units, the problem that the circuit layout comparison check and the layout design rule check cannot be effectively carried out, the present invention proposes an EMCCD suitable for simulation and inspection. The design method of unit model library, including EMCCD unit numerical analysis method, EMCCD unit numerical analysis structure, EMCCD unit numerical analysis simplified approximation method, EMCCD unit numerical analysis structure symbolic representation, EMCCD unit circuit and EMCCD circuit unit model library, described using EMCCD The unit numerical method constructs the numerical analysis structure of the EMCCD unit, simplifies and approximates the numerical analysis structure of the EMCCD unit, abstracts the corresponding general circuit symbols and customized circuit symbols, creates the circuit symbol expression of the EMCCD unit, and then establishes an EMCCD suitable for simulation and inspection Cell model library

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