An active high-density electrode array and its preparation method

An electrode array and active electrode technology, applied in the field of electrode arrays, can solve problems such as noise, and achieve the effects of improving signal quality, improving noise, light, thin, transparent and flexible power consumption

Active Publication Date: 2020-06-30
SHANGHAI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to provide an active high-density electrode array and its preparation method, which can realize multi-channel acquisition and improve the problem of noise in the signal transmission process

Method used

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  • An active high-density electrode array and its preparation method
  • An active high-density electrode array and its preparation method
  • An active high-density electrode array and its preparation method

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Embodiment 1

[0038] The active high-density electrode array provided in this embodiment adopts a matrix vertical and horizontal arrangement, and 64 active amplifying circuits and 64 electrodes are arranged as follows: figure 1 structure shown. In the later stage, different spatial filtering methods are realized through subsequent processing software, such as the common vertical single / double difference, horizontal single / double difference, double difference, etc. At the same time, the active high-density electrode array provided in this embodiment adopts an 8*8 electrode array, which provides favorable assistance for analyzing surface electromyographic signals of muscles of different complexity due to the increase of acquisition channels. Among them, the circular patterns arranged in 8*8 are electrodes for collecting electromyographic signals.

[0039] Such as figure 2 As shown, the active electrode unit provided in this embodiment is formed by integrating electrodes and active amplifie...

Embodiment 2

[0049] The preparation method of the active high-density electrode array provided in this embodiment includes the following steps:

[0050] The first step is the preparation of the flexible active electrode substrate.

[0051] Such as Figure 4 The schematic diagram of the structure of the flexible polyimide film substrate is shown, and the process steps are roughly as follows: spin-coat PI reagent on the cleaned glass substrate 1, and set the rotation speed to 500RPM (30s). After that, the following annealing steps are carried out: 80°C (30min)——100°C (60min)——200°C (60min)——300°C (30min)——400°C (10min) for annealing treatment, and then naturally cool down to room temperature. In order to ensure the adhesion of other films on the polyimide film layer 2, a buffer layer 3 composed of 300nm SiNx and 200nm SiO2 is prepared by plasma enhanced chemical vapor deposition. So far, the preparation of a flat and transparent flexible polyimide film substrate is completed.

[0052] The...

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Abstract

The invention discloses an active high-density electrode array and a preparation method thereof, and relates to the technical field of electrode arrays. The active high-density electrode array includes a plurality of active electrode units, and the active electrode units adopt metal oxide thin film transistors. Photolithography technology, which integrates electrodes and active amplifier circuits on a flexible active electrode substrate; all active electrode units are arranged vertically and horizontally in a matrix to form an active high-density electrode array, and the active high-density electrode array The number of rows is the same as the number of columns. The invention can preliminarily amplify the signal and then transmit it, so as to improve the noise problem in the signal transmission process and improve the signal quality. At the same time, the active high-density electrode array adopts an array arrangement to realize multi-channel acquisition.

Description

technical field [0001] The invention relates to the technical field of electrode arrays, in particular to an active high-density electrode array and a preparation method thereof. Background technique [0002] Existing electrodes are basically passive wet electrodes, which have few electrode channels (appearing as a single channel or a linear channel), which is cumbersome to handle during use and has a short lifespan. [0003] In addition, during the acquisition process of the passive wet electrode, since the surface EMG signal of the human body is very weak, it is easy to introduce electrical noise (main sources include motion artifacts, space electromagnetic wave interference, etc.). If the electrode is rigid, it will cause a large relative movement between the electrode and the superficial skin, and the measurement will be inaccurate. If the electrodes are passive, the collected small signals will be interfered by space electromagnetic waves during transmission, resulting...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): A61B5/0492A61B5/296
CPCA61B5/296
Inventor 张建华茅帅帅李俊李泽文
Owner SHANGHAI UNIV
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