Etching solution for etching metal layer composed of copper layer and molybdenum layer and application thereof
An etching solution and organic acid technology, applied in the field of etching solution for metal layers, can solve the problems of poor control of etching uniformity, uneven etching surface, increased environmental load, etc., and achieve uniform etching without residue, environmental friendliness, and etching speed. proper effect
An etching solution and organic acid technology, applied in the field of etching solution for metal layers, can solve the problems of poor control of etching uniformity, uneven etching surface, increased environmental load, etc., and achieve uniform etching without residue, environmental friendliness, and etching speed. proper effect
CN110219003BActive Publication Date: 2021-08-24江苏和达电子科技有限公司
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Embodiment 1-8
[0040]
[0041]
[0042] The etching performance of embodiment 1-8 is as shown in table 2:
[0043]
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Abstract
The invention discloses an etching solution and its application in etching a metal layer composed of a copper layer and a molybdenum layer. The etching solution comprises: an organic acid containing 3 or more carbon atoms; an organic base; hydrogen peroxide; stabilizers; and deionized water. The etching solution provided by the invention has the effects of appropriate etching rate, easy control of etching direction, uniform etching and no residue on the metal layer composed of copper layer and molybdenum layer, and the etching solution has high stability, is environmentally friendly, and has good application value.
Description
technical field [0001] The invention belongs to the field of metal surface chemical treatment, in particular to an etching solution for etching a metal layer composed of a copper layer and a molybdenum layer and an application thereof. Background technique [0002] A liquid crystal display (LCD) usually includes upper and lower substrates and a liquid crystal medium clamped therein. The substrate is usually provided with a metal layer containing copper and other low resistivity and high corrosion resistance. The metal layer of the display is mostly made of aluminum, copper, Titanium, iron and other metals or metal oxides, the process is more complicated. Due to the characteristics of the material, some of them can no longer meet the quality requirements of the current market, and the resistance of the metal wire is large, which will cause signal delay. If the number of screen swipes is less than 24 times per second, you will see tailing or freezing. Therefore, it is more co...
Claims
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Patent Timeline
24 Aug 2021
Publication
CN110219003B
- IPC
- C23F1/44; C23F1/18; C23F1/26
- CPC
- C23F1/18; C23F1/26; C23F1/44
- Inventors
- 王毅明; 邵振