Device and method for automatically measuring surface potential under particle bombardment
A surface potential and automatic measurement technology, which is applied in the direction of measuring devices, electrostatic field measurement, and material analysis through electromagnetic means, can solve problems such as electrostatic discharge and discharge threshold drop
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[0030] The technical solution of the present disclosure will be described in detail below with reference to the drawings and embodiments.
[0031] Such as figure 1 As shown, the present disclosure provides an automatic measurement device for surface potential under particle bombardment, including:
[0032] An air pumping module, the air pumping module includes a mechanical pump 1 and a molecular pump 2, the mechanical pump 1 and the molecular pump 2 are connected to the vacuum chamber through pipelines, and are used to extract the gas in the vacuum chamber to reduce the air pressure to 10 -6 Below Pa;
[0033] Charging module, described charging module comprises pulse signal generator 3, electron gun 4 and ion gun 5, wherein, described pulse signal generator 3 is positioned at vacuum chamber, and described electron gun 4 is positioned at vacuum chamber and described pulse signal generator 3 The first pulse output end of the ion gun 5 is connected to the first pulse output en...
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