Differential resonator and MEMS sensor

Abstract

The invention provides a differential resonator and an MEMS sensor. The differential resonator comprises a substrate, a first resonator, a second resonator and a coupling mechanism. The first resonator is connected with the second resonator through the coupling mechanism, the first resonator and the second resonator are connected with the substrate and can move relative to the substrate under theaction of external force, and the coupling mechanism comprises a first guide beam, a second guide beam, a first coupling beam, a second coupling beam, a first connecting piece and a second connectingpiece. The first guide beam and the second guide beam are arranged on the two opposite sides of the direction perpendicular to the vibration direction of the first resonator or the second resonator. One end of the first coupling beam is connected with the first guide beam, the other end of the first coupling beam is connected with the second guide beam, and the first coupling beam is connected with the first resonator through the first connector. One end of the second coupling beam is connected with the first guide beam, the other end of the second coupling beam is connected with the second guide beam, and the second coupling beam is connected with the second resonator through the second connector.

Description

【Technical field】 [0001] The invention relates to the technical field of MEMS (Micro Electromechanical Systems, micro mechanical electronic systems) sensors, in particular to a differential resonator and a MEMS sensor. 【Background technique】 [0002] The differential resonator has a higher quality factor, which can suppress common-mode interference such as external acceleration, vibration, and temperature, and can effectively reduce the circuit noise level. Therefore, the use of differential motion modes is an optimized mainstream solution to improve the performance of MEMS sensors. [0003] Such as Figure 1-2 As shown, the traditional differential resonator 4 includes a first resonator 41, a second resonator 42, a coupling mechanism 43 connecting the first resonator 41 and the second resonator 42, and a substrate 40, wherein the first resonator 41 , the second resonator 42 and the coupling mechanism 43 connecting the first resonator 41 and the second resonator 42 are all ...

AI Technical Summary

Problems solved by technology

[0004] However, in the manufacturing process of the differential resonator 4, the geometric dimensions of the first resonator 41 and the second resonator 42 cannot be almost identical

[0005] like image 3 As shown, under the driving action of the same external force, the first resonator 41 and the second resonator 42 will produce different amplitude outputs, that is, the displacement X of the first resonator 41 and the second resonator 42 in the same vibration direction A ≠X B , will force the coupling mechanism 43 to move △X in the unconstrained X direction. Therefore, the rectangular coupling mechanism has an effect on X A 、X B The correction effect of the difference is weak, so the traditional differential resonator has the disadvantages of low process robustness, small quality factor, and poor common-mode interference suppression ability

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