Micro-nano integrated solid-state thin-film lithium battery and preparation method thereof
A technology that integrates solid-state and lithium batteries. It is used in nano-battery, secondary battery manufacturing, battery pack components, etc. The effect of voltage, high power density
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[0047] The present invention also provides a specific embodiment of preparing thin-film lithium battery micro-unit 12, comprising the following steps:
[0048] Step 1: Prepare a substrate 11 made of a PET film, wash the surface of the PET film with ethanol, dry it in vacuum at 80° C. for 2 hours, and set aside.
[0049] Step 2: Print two current collectors 14 made of copper by screen printing on the substrate 11 made of PET film. The specific screen printing copper paste has a solid content of 70-80% and a viscosity of 1000-5000mPa. s, baked at 100°C for more than 10 minutes, with a thickness of 0-500nm.
[0050] Step 3: On the current collector 14, the sputtering material is LiCoO by radio frequency magnetron sputtering deposition method 2 positive electrode film 15, specifically at 1°C min -1 Raise the temperature of the sample stage to 780°C at a high speed. After the temperature reaches 780°C and keep it warm for 10 minutes, argon and oxygen are introduced. The argon flo...
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