Pressure control device for pipe type PECVD equipment

Abstract

The invention discloses a pressure control device for pipe type PECVD equipment. The pressure control device for the pipe type PECVD equipment comprises at least one group of reaction chambers, each group of the reaction chambers is correspondingly provided with a VAT valve and a main suction pump, and all groups of the reaction chambers share a pre-suction pump; each group of the reaction chambers comprises a first reaction chamber and a second reaction chamber, the first reaction chamber in each group of the reaction chambers communicates with the corresponding main suction pump through a first main pipeline, the second reaction chamber in each group of the reaction chambers communicates with the corresponding main suction pump through a second main pipeline, each first main pipeline andthe corresponding second main pipeline are connected in parallel to form a flow converging pipeline, each flow converging pipeline is connected with the corresponding main suction pump, and each VATvalve is arranged on the corresponding flow converging pipeline; and the first reaction chamber in each group of the reaction chambers is connected with the pre-suction pump through a first branch pipeline, and the second reaction chamber in each group of the reaction chambers is connected with the pre-suction pump through a second branch pipeline. The pressure control device for the pipe type PECVD equipment is mainly characterized in that when two pipes share the main suction pump, the technological processes are staggered, that is to say, only one main suction pump works for each reaction chamber all the time, the other pipe works through the pre-suction pump at other time, and therefore the cost of the equipment is greatly reduced.

Description

technical field [0001] The invention relates to tubular PECVD equipment in photovoltaic manufacturing, in particular to a pressure control device for tubular PECVD equipment. Background technique [0002] Tubular PECVD is an indispensable equipment in the field of photovoltaic manufacturing. In recent years, with the rapid development of my country's photovoltaic industry, photovoltaic products have entered our lives. The popularity of photovoltaic products is accompanied by the reduction of product costs. The production of batteries A large part of the cost of the chip comes from the equipment, so how to find ways to reduce the cost of the equipment has become an important aspect of photovoltaic equipment research. [0003] In the existing general tubular PECVD, each tube (reaction chamber) is equipped with a pump, each tube is controlled separately, and the cost is relatively high. There is also a technical solution that two tubes share a relatively high-power vacuum pump, ...

AI Technical Summary

Problems solved by technology

[0003] In the existing general tubular PECVD, each tube (reaction chamber) is equipped with a pump, each tube is controlled separately, and the cost is relatively high. There is also a technical solution that two tubes share a relatively high-power vacuum pump, which is equivalent to One pump pumps two pipes at the same time

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