Single-cavity axial-flow piezoelectric pump with valve and driving method
An axial flow, piezoelectric pump technology, applied in the direction of variable displacement pump parts, pumps with flexible working elements, parts of pumping devices for elastic fluids, etc. Limiting the maximum opening degree of the valve, affecting the stable output of the pump, etc., to achieve the effect of increasing the opening degree, increasing the output flow, and improving the flow output
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[0027] The invention discloses a single-cavity axial-flow piezoelectric pump with a valve. The pump body structure is mainly composed of three parts, namely the upper cover for fixing the piezoelectric vibrator, the intermediate body with cavity structure and passive stop valve, and the lower cover for pressing and sealing.
[0028] Such as Figure 1-4 As shown, the alternating voltage acts on the piezoelectric vibrator for one cycle. When the circular piezoelectric vibrator 5 vibrates upward, the volume of the pump chamber 3 becomes larger, and the external ambient pressure acting on the inlet valve 4 is greater than the internal pressure of the pump chamber. , the inlet valve is gradually opened, and the fluid enters the pump chamber through inlet 11. When the piezoelectric vibrator vibrates downward, the volume of the pump chamber becomes smaller, the external ambient pressure acting on the inlet valve is lower than the internal pressure of the pump chamber, the outlet val...
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