A piezoelectric micropump
A micro-pump, piezoelectric technology, applied in variable capacity pump parts, pumps, pump components, etc., can solve the problems of small valve opening, large flow resistance, complicated valve bonding process, etc., to achieve enlarged opening degree, simplification of the assembly process, and the effect of facilitating industrialized mass production
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[0030] In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as there is no conflict with each other.
[0031] figure 1 It is an anatomical diagram of a preferred embodiment of the piezoelectric micropump of the present invention, including a piezoelectric vibrator 1 , an upper pump body 2 , a valve plate 3 , a lower pump body 4 and a base 5 .
[0032] see figure 2 , the valve plate 3 includes an inlet valve 301 and an outlet valve 302; the piezoelectric vibrator 1 cooperates with the upper pump bo...
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