Reaction cavity

Abstract

The invention provides a reaction cavity. The reaction cavity comprises a cavity body where a through hole is formed, a gas inlet pipe extending into the cavity through the through hole, a first limiting structure arranged on an inner side of the cavity, a second limiting structure which is arranged on the gas inlet pipe and matched with the first limiting structure so as to limit axial rotation and radial translation of the gas inlet pipe, and a third limiting structure which is connected with the cavity and matched with the second limiting structure so as to limit radial rotation and axial translation of the gas inlet pipe. The reaction cavity is advantaged in that the gas inlet pipe can be fixed stably, so distribution uniformity of reaction gas in the reaction cavity can be improved, and the gas inlet pipe is not easy to damage.

Description

technical field [0001] The invention relates to the technical field of semiconductor heat treatment equipment, in particular to a reaction chamber. Background technique [0002] At present, semiconductor heat treatment equipment is an important process equipment for integrated circuit manufacturing. It mainly includes a reaction chamber and an inlet pipe. The reaction gas enters the reaction chamber through the inlet pipe and reacts with the semiconductor parts to be processed, thereby performing heat treatment on the semiconductor parts to be processed. processing. Among them, the outlet position of the inlet pipe will directly affect the distribution of the reaction gas in the reaction chamber, and the uniformity of the distribution of the reaction gas in the reaction chamber will affect the process performance of semiconductor heat treatment, and because the temperature in the reaction chamber is high and the metal Elements will have a great impact on the performance of ...

AI Technical Summary

Problems solved by technology

[0004] However, due to the small contact area between the upper end of the bolt 4 and the horizontal part of the intake duct 1, this may cause the intake duct 1 to tilt and slide relative to the bolt 4, resulting in a change in the outlet position of the intake duct 1, thereby affecting the reaction The distribution of gas in the reaction chamber, and when the bolt 4 is used to adjust the intake duct 1 or the intake duct 1 tilts and slides, the horizontal part of the intake duct 1 and the bolt 4 are prone to breakage, causing the intake air The damage of conduit 1 and the high temperature in the reaction chamber are prone to thread jamming or loosening, affecting the normal adjustment function of the bolt 4 to the intake conduit 1, resulting in a decrease in efficiency and an increase in cost

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