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Core composite type silicon piezoresistive pressure sensor

A pressure sensor, silicon piezoresistive technology, applied in the measurement of the property force of the piezoelectric resistance material, fluid pressure measurement by changing the ohmic resistance, etc., to achieve the effect of flexible configuration, high integration, and convenient implementation

Active Publication Date: 2019-12-13
BEIJING AUTOMATION CONTROL EQUIP INST
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to overcome the deficiencies in the prior art and provide a core composite silicon piezoresistive pressure sensor to solve the technical problems existing in the pressure measurement of the existing silicon piezoresistive pressure sensor

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  • Core composite type silicon piezoresistive pressure sensor
  • Core composite type silicon piezoresistive pressure sensor
  • Core composite type silicon piezoresistive pressure sensor

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Embodiment Construction

[0030] It should be noted that, in the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined with each other. The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. The following description of at least one exemplary embodiment is merely illustrative in nature and in no way taken as limiting the invention, its application or uses. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0031] It should be noted that the terminology used here is only for describing specific implementations, and is not intended to limit t...

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Abstract

The invention provides a core composite type silicon piezoresistive pressure sensor in order to solve the problem of full-range precision defect in pressure measurement of an existing silicon piezoresistive pressure sensor. The pressure sensor comprises a plurality of silicon piezoresistive pressure sensor cores, a core composite shell and an information processing circuit board. Each silicon piezoresistive pressure sensor core comprises a silicon piezoresistive pressure sensor chip used for collecting the pressure of a to-be-measured piece. The ranges of the silicon piezoresistive pressure sensor cores are different, and the ranges of the silicon piezoresistive pressure sensor cores cover the full range of use. The core composite shell is used for packaging a plurality of silicon piezoresistive pressure sensor core assemblies and providing a unified test pressure medium for the silicon piezoresistive pressure sensor core assemblies. The information processing circuit board is arrangedon the core composite shell, and the information processing circuit board is used for controlling and realizing cooperative measurement and switching output of the silicon piezoresistive pressure sensor cores.

Description

technical field [0001] The invention relates to the technical field of microelectronic machinery and pressure sensors, in particular to a core-composite silicon piezoresistive pressure sensor. Background technique [0002] Silicon piezoresistive pressure sensor is the most mature type of silicon micro pressure sensor. It has the advantages of small size, high sensitivity, strong overload capacity, small process difficulty, and low cost. It is widely used in aerospace, industrial control, and consumer electronics. and other fields. At present, there are many researches on the application of silicon piezoresistive pressure sensors, mainly using micromachining and integration technologies to realize the miniaturization, integration, intelligence, serialization, and standardization of sensors, and to develop in the direction of high reliability. [0003] In the application of pressure sensors in high-altitude meteorological detection, aerospace and other fields, it is often nec...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L9/06G01L1/18
CPCG01L1/18G01L9/06
Inventor 朱晓柏楠谢耀韩士超
Owner BEIJING AUTOMATION CONTROL EQUIP INST
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