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Core composite silicon piezoresistive pressure sensor

A pressure sensor, silicon piezoresistive technology, applied in the measurement of the property force of the piezoelectric resistance material, fluid pressure measurement by changing the ohmic resistance, etc., to achieve compact structure, facilitate volume control, and avoid process complexity Effect

Active Publication Date: 2021-10-19
BEIJING AUTOMATION CONTROL EQUIP INST
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  • Abstract
  • Description
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Problems solved by technology

[0004] The purpose of the present invention is to overcome the deficiencies in the prior art and provide a core composite silicon piezoresistive pressure sensor to solve the technical problems existing in the pressure measurement of the existing silicon piezoresistive pressure sensor

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  • Core composite silicon piezoresistive pressure sensor
  • Core composite silicon piezoresistive pressure sensor
  • Core composite silicon piezoresistive pressure sensor

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Embodiment Construction

[0030] It should be noted that, in the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined with each other. The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. The following description of at least one exemplary embodiment is merely illustrative in nature and in no way taken as limiting the invention, its application or uses. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0031] It should be noted that the terminology used here is only for describing specific implementations, and is not intended to limit t...

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Abstract

The invention provides a core-body composite silicon piezoresistive pressure sensor to solve the defect problem of full-range precision existing in the pressure measurement of the existing silicon piezoresistive pressure sensor. The pressure sensor includes: a plurality of silicon piezoresistive pressure sensor cores, the silicon piezoresistive pressure sensor cores include a silicon piezoresistive pressure sensor chip for pressure acquisition of the object to be tested; a plurality of silicon piezoresistive pressure sensors The ranges of the chips are different, and the ranges of multiple silicon piezoresistive pressure sensor chips cover the full range used; the core composite shell, the core composite shell is used to package multiple silicon piezoresistive pressure sensor core components , and provide a unified test pressure medium for the plurality of silicon piezoresistive pressure sensor core assemblies; an information processing circuit board, the information processing circuit board is arranged on the core composite shell, and the information processing circuit board is used for Control and realize the coordinated measurement and switching output of multiple silicon piezoresistive pressure sensor cores.

Description

technical field [0001] The invention relates to the technical field of microelectronic machinery and pressure sensors, in particular to a core-composite silicon piezoresistive pressure sensor. Background technique [0002] Silicon piezoresistive pressure sensor is the most mature type of silicon micro pressure sensor. It has the advantages of small size, high sensitivity, strong overload capacity, small process difficulty, and low cost. It is widely used in aerospace, industrial control, and consumer electronics. and other fields. At present, there are many researches on the application of silicon piezoresistive pressure sensors, mainly using micromachining and integration technologies to realize the miniaturization, integration, intelligence, serialization, and standardization of sensors, and to develop in the direction of high reliability. [0003] In the application of pressure sensors in high-altitude meteorological detection, aerospace and other fields, it is often nec...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L9/06G01L1/18
CPCG01L1/18G01L9/06
Inventor 朱晓柏楠谢耀韩士超
Owner BEIJING AUTOMATION CONTROL EQUIP INST
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