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An imprinting method, an imprinting structure and a display substrate

A substrate and embossing glue technology, which is applied in the direction of equipment, pattern surface photolithography, optics, etc., can solve the problems of a lot of time spent on production and huge costs, and achieve the effect of reducing production time and cost and reducing quantity

Active Publication Date: 2021-08-13
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The present invention provides an imprinting method, an imprinting structure and a display substrate to solve the problem that the existing nano-imprinting templates required for products of different specifications require a lot of time to make and require huge costs

Method used

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  • An imprinting method, an imprinting structure and a display substrate
  • An imprinting method, an imprinting structure and a display substrate
  • An imprinting method, an imprinting structure and a display substrate

Examples

Experimental program
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Embodiment 1

[0033] refer to figure 1 , which shows a flow chart of an imprinting method according to an embodiment of the present invention, which may specifically include the following steps:

[0034] Step 101, forming a hydrophobic layer on the substrate to be imprinted.

[0035] In the embodiment of the present invention, firstly, as figure 2 The substrate to be imprinted 21 is shown, and then, a hydrophobic layer is formed on the substrate to be imprinted 21 .

[0036] Wherein, the substrate to be imprinted 21 includes a base substrate 211 and a patterned layer 212 formed on the base substrate 211. .

[0037] The patterned layer 212 refers to the etching object when the embossing pattern formed subsequently is used for etching. After the embossing template is used to imprint the substrate 21 to be imprinted, the embossing pattern can be formed. The patterned layer 212 is etched to form a desired structure.

[0038] Such as figure 2 As shown, the substrate to be imprinted 21 fu...

Embodiment 2

[0062] An embodiment of the present invention provides an embossed structure, which is manufactured by the embossing method described in the first embodiment above.

[0063] The imprinted structure refers to the formation of Figure 7 After the structure shown, based on the formed embossing pattern 231, the patterned layer 212 is etched to form a structure. The structure formed after etching the patterned layer 212 may be a via hole or other structures in the display substrate manufacturing process. structure etc.

[0064] In addition, for the specific description of the imprinting method, reference may be made to the description of Embodiment 1, which will not be repeated in this embodiment of the present invention.

[0065] An embodiment of the present invention also provides a display substrate, including the above-mentioned embossed structure.

[0066] The display substrate may be an array substrate in a display device. During the process of manufacturing the display sub...

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Abstract

The invention provides an embossing method, an embossing structure and a display substrate, and relates to the field of display technology. In the present invention, a hydrophobic layer is formed on the substrate to be imprinted, and an embossed adhesive layer is formed on the substrate to be imprinted with the hydrophobic layer formed. The orthographic projections of the embossed adhesive layer and the hydrophobic layer on the substrate to be imprinted do not overlap. The embossing template embosses the substrate to be imprinted on which the hydrophobic layer and the embossing adhesive layer are formed, so as to form an embossing pattern at the position of the embossing adhesive layer. For products of different specifications, after the substrate to be imprinted is patterned through the hydrophobic layer, the same nano-imprint template can be used to imprint the required imprint pattern, so that products of different specifications can be imprinted with the same nano-imprint template Printing greatly reduces the number of nanoimprint templates, and its production time and cost are greatly reduced.

Description

technical field [0001] The invention relates to the field of display technology, in particular to an embossing method, an embossing structure and a display substrate. Background technique [0002] With the development of display technology, imprinting technology is becoming more and more mature. Imprinting technology is an important thin film patterning technology besides photolithography technology. [0003] The current imprinting method is to apply imprinting glue on the entire surface of the substrate to be imprinted, and then align the patterned nano-imprint template with the substrate to be imprinted, and use a patterned nano-imprinting template after the alignment. The imprinting template is used to imprint the substrate to be imprinted. For products of different specifications, different nanoimprinting templates need to be produced. [0004] However, large-scale nanoimprint templates are usually made by electron beam direct writing or splicing technology. It takes a ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/00G03F7/16
CPCG03F7/0002G03F7/161
Inventor 郭康谷新
Owner BOE TECH GRP CO LTD