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A kind of immersion type cleaning method for quartz furnace tube

A technology for quartz furnaces and furnace tubes, applied in cleaning methods and appliances, cleaning methods using liquids, chemical instruments and methods, etc., can solve the problems of easily damaged quartz furnace tubes, achieve small movement range, reduce the risk of damage, Simple action mechanism

Active Publication Date: 2021-05-04
JIANGSU ASIA ELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

No matter the immersion type or the spray type, complex action mechanisms are required, and the quartz furnace tube is easily damaged in case of accidents in various actions.

Method used

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  • A kind of immersion type cleaning method for quartz furnace tube
  • A kind of immersion type cleaning method for quartz furnace tube
  • A kind of immersion type cleaning method for quartz furnace tube

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0039] This embodiment provides a quartz furnace tube immersion cleaning method, comprising the following steps:

[0040] S1: Place the quartz furnace tube to be cleaned on the fixed arms located on both sides of the quartz furnace tube with a height difference, and make the opening of the quartz furnace tube face down. The angle between the central axis of the quartz furnace tube and the horizontal plane is 20 -30°, such as: 20°, 25°, 30°; in order to protect the quartz furnace tube, the fixed arm is provided with a corrosion-resistant silicone rubber pad;

[0041] S2: Make the quartz furnace tube move relative to the cleaning tank filled with cleaning liquid, make the quartz furnace tube close to the cleaning liquid in the cleaning tank, and adjust the fixed arms on both sides when the inner wall of the quartz furnace tube is in contact with the liquid surface of the cleaning liquid. Position, so that the opening of the quartz furnace tube gradually faces upwards. When the o...

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Abstract

This application relates to a immersion-type cleaning method for quartz furnace tubes. By controlling the orientation of the opening of the quartz furnace tubes into the cleaning liquid, the cleaning liquid can fully flow into the quartz furnace tubes to prevent air bubbles from being generated on the inner wall of the quartz furnace tubes during direct immersion. Thorough cleaning. At the same time, when the quartz furnace tube is soaked, it only needs to adjust the opening direction of the quartz furnace tube through the action of the fixed arms on both sides. The movement range of the quartz furnace tube is small, and the whole action mechanism is simple, which reduces the damage of the quartz furnace tube risks of.

Description

technical field [0001] The present application belongs to the technical field of semiconductor cleaning equipment, in particular to a immersion cleaning method for quartz furnace tubes. Background technique [0002] Quartz furnace tubes are usually used in conjunction with diffusion furnaces (diffusion furnace temperatures reach 800°C), and are often used for high-temperature diffusion of silicon wafers in semiconductor processing. When carrying out the high temperature diffusion process, the silicon wafer and the silicon wafer bracket are put into the quartz furnace tube for the process. In order to make the diffusion more stable and the distribution of the PN junction more uniform, it is necessary to ensure that the pressure in the quartz tube is stable and the airtightness is good. The quartz furnace tube will produce fouling during the long-term diffusion process, and the diffusion process has very strict requirements on the cleanliness of the quartz furnace tube, and o...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B08B9/02B08B3/12
CPCB08B3/12B08B9/02
Inventor 钱诚李刚李文亭
Owner JIANGSU ASIA ELECTRONICS TECH CO LTD
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