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Method and apparatus for optimizing the optical performance of interferometers

An interferometer, a technology of nature, applied in the direction of using optical devices, material analysis by optical means, instruments, etc., can solve the problems of unavailability and too expensive of imagers

Active Publication Date: 2020-02-25
ZYGO CORPORATION
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Problems solved by technology

[0005] Early instruments used relatively low-density imagers (i.e., VGA density, 320x240 or 640x480 pixels) because higher-density imagers were either unavailable or prohibitively expensive at the time

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  • Method and apparatus for optimizing the optical performance of interferometers
  • Method and apparatus for optimizing the optical performance of interferometers
  • Method and apparatus for optimizing the optical performance of interferometers

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Embodiment Construction

[0043] Disclosed herein is an interferometer for measuring surface topography, form or texture or optical wavefront, which includes an interferometer for determining the position of the object under test using a distance measurement system, and automatically or Interactively adjust the optical focusing properties of the interferometer to optimize the quality and resolution of the final topographic image. A method of using an interferometer is also disclosed.

[0044] In some embodiments of the method using an interferometer, the optimization of the final topography image includes the following three steps: i) Initial calibration to determine the proper focus setting relative to the reference position as a function of the position of the test object; ii) Determine the position of the test object surface relative to the reference position through the distance measurement system; and iii) Adjust the instrument on hardware or software to bring the test object surface to the best focu...

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Abstract

A method for measuring a property of a test object with an interferometer includes: a) providing calibration information relating a focus setting for the interferometer to a position of the test object relative to a reference surface of the interferometer; b) determining the position of the test object relative to the reference surface; and c) using the interferometer to collect interferometric images of the test object for use in measuring the property of the test object.

Description

[0001] This application is a divisional application of the invention patent application with the filing date of November 08, 2017, the application number being 201780071464.3, and the invention title being "Method and Equipment for Optimizing the Optical Performance of Interferometers". [0002] Cross references to related applications [0003] This application claims the priority of U.S. Provisional Patent Application No. 62 / 423,856 filed on November 18, 2016 in accordance with 35USC§119. The entire content of this provisional application is incorporated herein by reference in its entirety. Background technique [0004] Due to the ease of use, performance, and versatility of interferometry for optical wavefront and surface topography measurement, it has become and has become a popular technique for high-precision measurement. Phase-shifting interferometry ("PSI") is an interferometric technique. PSI involves precisely moving one of the surfaces of the cavity (typically the referen...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B9/02
CPCG01B9/02072G01B9/02063G01N21/45G01N2021/7779
Inventor L.L.德克
Owner ZYGO CORPORATION
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