Corrosion resistant carbon coatings
A corrosion-resistant and coating technology, applied in the field of improved corrosion-resistant carbon-based coatings and their preparation, can solve problems such as unsolved corrosion resistance of coatings, and achieve good hardness, wear resistance, and good corrosion resistance. Effect
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Embodiment 1
[0102] The scheme of preparing anti-corrosion film according to the present invention is as follows:
[0103] a. The first preparation before coating is ultrasonic cleaning of the high-speed steel (HSS) substrate with a cleaning agent. The substrate was then rinsed with deionized water and dried (following standard cleaning procedures used in the vacuum industry).
[0104] b. Place the cleaned HSS substrate in a vacuum chamber equipped with sputtering, CVD and FCVA targets / sources.
[0105] c. Evacuate the vacuum chamber to reduce the pressure to less than 1x10-5 Torr (0.00133Pa), and heat it to between 150°C and 200°C.
[0106] d. Ion cleaning is carried out in a vacuum chamber to activate the surface of the substrate and promote adhesion.
[0107] e. Underlayer deposition: sputtering process, 100°C-150°C, NiCr target material, coating thickness = 1.0 μm.
[0108] f. Isolation layer deposition: plasma-assisted CVD,, C2H2 (flow=100sccm), Ar (flow=200sccm), bias voltage=600V...
Embodiment 2
[0111] Example 2 - Corrosion Resistance Test
[0112] Coating of the present invention (as implement shown in Example 1) were tested against uncoated and DLC-coated substrates in a salt spray test to measure their corrosion resistance in comparison.
[0113] Test material:
[0114] a. Uncoated high-speed steel W 6 Mo 5 Cr 4 V 2 Substrate (no surface treatment), hardness = 746.9 HV.
[0115] b.Ta-C coating coated high speed steel W 6 Mo 5 Cr 4 V 2 Substrate, coating thickness = 2.3μm, hardness = 2212HV. Coating according to implement Prepared by the method of Example 1, and the isolation layer deposition step (f) was omitted.
[0116] c. Invention of ta-C coating coated high speed steel W 6 Mo 5 Cr 4 V 2 base material (such as implement Example 1), coating thickness = 2.5 μm, hardness = 2317HV.
[0117] d. DLC-coated HSS W only 6 Mo 5 Cr 4 V 2 Substrate. Coating thickness = 2.5 μm, hardness = 1540 HV.
[0118] Salt spray conditions:
[0119] Concent...
Embodiment 3
[0137] Example 3 - Additional Protocols The protocol for coating high speed steel substrates with the coatings described in the present invention is described below.
[0138] Step 1: First, clean the base material with industrial cleaning agent and ultrasonic wave, rinse with pure water and dry. This cleaning process is usually used in the vacuum coating industry to remove oil stains and dirt on the surface of the substrate before coating.
[0139] Step 2: Load and fix the substrate in the coating chamber, heat the coating chamber to 130°C, and reduce the pressure to 1.0x10-3Pa to 4.0x10-3Pa.
[0140] Step 3: Plasma cleaning is to activate the surface of the substrate to be coated (for example ion cleaning USES, for example using the linear ion source device described in Chinese Patent Application No. 201621474910.4).
[0141] Step 4: Coating the primer layer on the activated substrate by magnetron sputtering process. Negative bias pulses (150V-600V) are commonly used for ...
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Abstract
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