Shelf, bearing disc, tray, buffer cavity, loading cavity and substrate conveying system

Abstract

The invention relates to a shelf, a bearing disc, a tray, a buffer cavity, a loading cavity and a substrate conveying system. The substrate conveying system comprises a buffer cavity, a loading cavity, a first manipulator and a second manipulator; each first shelf included in the buffer cavity is used for bearing a plurality of bearing discs; the first manipulator is used for loading a plurality of substrates onto each bearing disc of the first shelf; the second manipulator is used for taking out the plurality of bearing discs from the first shelf and loading the plurality of bearing discs onthe trays of second shelves; and the plurality of second shelves included in the loading cavity are used for bearing the plurality of trays. The substrate conveying system is low in cost. With the substrate conveying system adopted, whole process time can be shortened, production takt is accelerated, and the requirements for large productivity and high efficiency of a large-size and fast-takt production MOCVD system can be met.

Description

technical field [0001] The invention belongs to the technical field of substrate transmission in an MOCVD system, and in particular relates to a shelf, a carrying plate, a tray, a buffer cavity, a loading cavity and a substrate transmission system. Background technique [0002] Metalorganic Chemical Vapor Deposition (MOCVD) uses Group III organometallic reactants to react with Group V hydrides to form Group III and Group V compound films on a heated substrate. [0003] An MOCVD system and an operation method thereof in which a manipulator transfers a substrate includes a manipulator and a plurality of epitaxial reaction chambers, which can automatically transfer a carrier plate to each epitaxial reaction chamber, thereby improving production efficiency. [0004] For example, figure 1 As shown in the structure of the tray and the substrate, many substrates 002 are placed on a tray 001, and the plurality of substrates 002 are often placed on the tray 001 one by one when trans...

AI Technical Summary

Problems solved by technology

[0007] In order to solve the above-mentioned problems in the prior art, the present invention provides a shelf, a carrier tray, a tray, a buffer chamber, a loading chamber and a substrate transfer system, which solves the problem of inconvenient pick-and-place in the prior art

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