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Defect inspection system for specimen and defect inspection method for specimen

A defect inspection, sample technology, applied in the field of defect inspection system for samples and defect inspection for samples

Pending Publication Date: 2020-05-19
SAMSUNG DISPLAY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Defects in cover glass are among the defects in display devices that are most easily found by users

Method used

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  • Defect inspection system for specimen and defect inspection method for specimen
  • Defect inspection system for specimen and defect inspection method for specimen
  • Defect inspection system for specimen and defect inspection method for specimen

Examples

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Embodiment Construction

[0042] Since the present disclosure can be variously modified and carried out in many different forms, specific embodiments are therefore illustrated in the drawings and described herein. However, the present disclosure should not be limited to a specific form of disclosure, and should be construed to include all modifications, equivalents, or substitutes included in the spirit and scope of the present disclosure. Rather, these embodiments are provided as examples so that this disclosure will be thorough and complete, and will fully convey the aspects and features of the invention to those skilled in the art. Accordingly, processes, elements, and techniques that are not necessary for a person of ordinary skill in the art to fully understand the aspects and features of the present disclosure may not be described. Unless otherwise noted, the same reference numerals denote the same elements throughout the drawings and written description, and thus descriptions thereof may not be ...

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Abstract

A defect inspection system for a specimen includes an image sensor and a defect inspection device. The image sensor is configured to capture a target image of the specimen that includes a flat portionand a curved portion extending from the flat portion along a first direction and having a curvature. The target image includes a first area corresponding to the flat portion of the specimen and a second area corresponding to the curved portion of the specimen. The defect inspection device is configured to determine a defect of the specimen based on the target image. The defect inspection device includes an image editor that is configured to enlarge a width of the second area along the first direction by a resize ratio.

Description

[0001] This application claims priority and benefit from Korean Patent Application No. 10-2018-0138795 filed on November 13, 2018, the contents of which are hereby incorporated by reference in their entirety. technical field [0002] The present disclosure relates to a defect inspection system for a sample and a method of inspecting a sample for defects. Background technique [0003] The display device may be used as a display for mobile devices such as smart phones, digital cameras, video cameras, mobile terminals, laptop computers, and tablet personal computers, or may be applied to electric and electronic products such as television sets . By considering the impact on user convenience, such as user's grip and ease of portability, the display device can have a constant curvature in its edge region (or periphery), and can also provide improved aesthetics. Therefore, the edge region (or peripheral region) of the cover glass of the display device also has a constant curvatur...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/95G01N21/01
CPCG01N21/9515G01N21/01G06T3/403G06T7/001G06T2207/30108G06T2207/20021G01N21/95G01N21/958G06T7/0004G01N2021/8887G06T3/40
Inventor 河成根
Owner SAMSUNG DISPLAY CO LTD
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