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Composite filter

A filter and secondary filtration technology, applied in the direction of dispersed particle filtration, chemical instruments and methods, separation methods, etc., can solve the problems of metal filter element damage, flow into process equipment or clean room, etc., to prevent pressure deviation or pressure loss , the effect of high filtration performance

Active Publication Date: 2020-06-02
株式会社 UNILOK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] When the pressure deviation is above a predetermined size or a sudden pressure deviation occurs, the brittle metal filter element will be damaged rapidly, and countless particles generated from the damaged metal filter element will directly flow into the process equipment or the inside of the clean room. Fatal problem

Method used

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Embodiment Construction

[0035] The present invention described below can be modified variously, and can have various embodiments, and specific embodiments are shown by way of example in the drawings and described in detail in the detailed description.

[0036] However, it is not intended to limit the present invention to specific embodiments, and it should be understood that all transformations, equivalents, and substitutions included within the spirit and technical scope of the present invention are included. In describing the present invention, when it is judged that the detailed description of related known technologies may obscure the gist of the present invention, the detailed description will be omitted.

[0037] The terms used in the present application are used only to describe specific embodiments, and are not intended to limit the meaning of the present invention. Expressions in the singular include expressions in the plural as long as there is no grammatical difference. In this applicatio...

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Abstract

The invention discloses a composite filter, which comprises: a shell, wherein the shell comprises a first shell and a second shell, the first shell forms a fluid introduction par for fluid introducing, and the second shell is coupled to the first shell to form a receiving space, and forms a fluid discharge part from filtered fluid discharging; a first filter unit coupled to the first shell and used for reducing the pressure of a fluid passing through the fluid introduction part to diffuses the fluid and filtering the fluid for the first time; and a second filter unit positioned in the receiving space, coupled to the second shell and used for filtering the fluid for the second time before the fluid passes through the fluid discharge part.

Description

technical field [0001] The present invention relates to a composite filter, and in particular, the present invention relates to a filter that prevents the pressure difference between the pressure of the fluid before filtration and the pressure of the fluid after filtration while having excellent filtration performance that can be used in manufacturing equipment for semiconductor processes. Broken composite filter. Background technique [0002] In general, a semiconductor element is complicated by a thin film formation process of forming various thin films such as an organic film, an insulating film, and a metal film on a silicon wafer, a thin film patterning process of patterning a thin film, and an ion implantation process of injecting ions into a wafer. Manufacturing process and sophisticated manufacturing equipment. [0003] In order to manufacture semiconductor elements, a very clean environment and high-purity process gas are required, because when particles are contai...

Claims

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Application Information

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IPC IPC(8): B01D46/00
CPCB01D46/64
Inventor 柳明镐
Owner 株式会社 UNILOK
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