Workbench and using method thereof
A workbench and platform technology, which is applied in the direction of optical device exploration, etc., can solve the problem that the target and the target inspection ticket cannot be one-to-one correspondence
Pending Publication Date: 2020-07-07
KONFOONG MATERIALS INTERNATIONAL CO LTD
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Problems solved by technology
[0005] The problem solved by the invention is to avoid the situation that the target material and the inspection ticket corresponding to the target material cannot be corresponded one by one during the feeding process
Method used
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Embodiment Construction
[0023] In the prior art, the target material and the inspection ticket are manually placed on a fixed position on the material table, and then the manipulator grabs the target material on the material table for subsequent processing.
[0024] According to the inventor's analysis and research, in the above-mentioned feeding method, the grabbing frequency and position of the manipulator are fixed. In manual operation, if the check ticket is forgotten to be placed on the material table or placed in an improper position, the manipulator cannot grab it. It will cause the target material to miss the corresponding inspection ticket or the target material and the inspection ticket do not correspond one-to-one in the subsequent processing process, resulting in the risk of mixing materials.
[0025] According to the inventor's analysis and research, a new workbench is needed, which can judge the presence or absence of the target material and the inspection ticket put on it. When there ar...
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The invention relates to a workbench and a use method thereof, the workbench comprises: an object placing platform, the object placing platform comprises at least one detection area, and each detection area is used for accommodating a first detection target and a second detection target; the first detection system that is located on the storage platform, arranged in a detection area correspondingto the first detection target and used for detecting whether the first detection target exists or not; and the second detection system that is located on the storage platform, is arranged in a detection area corresponding to the second detection target and is used for detecting whether the second detection target exists or not. Whether a detection target exists in each area or not is detected, itcan be effectively guaranteed that the workbench has the first detection target and the second detection target at the same time, and the phenomenon that material mixing is caused in next-step machining when the first detection target and the second detection target are different can be avoided.
Description
technical field [0001] The invention relates to the field of semiconductor target material processing, in particular to a workbench and a using method thereof. Background technique [0002] In the process of processing the semiconductor target, it needs to go through multiple processes. Before processing the semiconductor target, the target should be placed on the material table, and after the target is grabbed by the manipulator, the subsequent Processing, the information of each step of the processing of the target should be recorded, and the recorded paper is a check and move ticket, so each of the targets corresponds to a check and move ticket, during the processing, each of the said The target has a fixed and exclusive pick-up ticket. [0003] In the prior art, the material is loaded manually, the manipulator has a fixed grabbing action and grabbing point, and the target and inspection ticket are manually placed on the material table, and the manipulator performs subse...
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Login to View More IPC IPC(8): G01V8/20
CPCG01V8/20
Inventor 姚力军潘杰王学泽罗明浩沈国继赵剑周洪涛
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD