Synchronous shrinkage liner tube for sintering tubular ITO target blank and preparation method thereof

Abstract

The invention discloses a synchronous shrinkage liner tube for sintering a tubular ITO target blank and a preparation method thereof. A raw material for preparing the synchronous shrinkage liner tubeis tetragonal polycrystalline zirconium oxide powder with the specific surface area of 15-25 m<2>.G<-1> or barium strontium titanate powder with the specific surface area of 18-30 m<2>.G<-1>. The preparation method comprises the following steps: adding deionized water accounting for 50% of the target solid phase content of the slurry into the raw materials to obtain a mixed solution, adding a dispersing agent, regulating the pH value of the mixed solution to 9-10, adding an adhesive accounting for 1.0-1.5% of the mass of the raw materials, uniformly mixing, carrying out ball milling in a ballmill to obtain slurry, pumping the slurry into a prilling tower for prilling to obtain prilling powder, putting the prilling powder into a mold, and carrying out compression molding to obtain the synchronous shrinkage liner tube. The synchronous shrinkage liner tube plays a role in replacing spherical ceramic paving materials, and due to the fact that the shrinkage rate of the synchronous shrinkage liner tube is slightly larger than that of a tubular ITO target material blank, the effect of better reducing sintering shrinkage resistance is achieved, and preparation procedures before sinteringare reduced, so that the production operation is more convenient.

Description

technical field [0001] The invention relates to the technical field of sintering tubular ITO target products, in particular to a synchronous shrinkage liner for sintering tubular ITO target blanks and a preparation method thereof. Background technique [0002] ITO is the abbreviation of Tin-doped Indium Oxide, which refers to an indium tin oxide material. The tubular ITO target is fired from a cylindrical green body made of indium tin oxide, and the inner diameter of the green body is generally 150~200mm. , The outer diameter is 165~220mm, and the cylinder height is 300~350mm. [0003] At present, when the tubular ITO target body is sintered in China, most of them are directly placed vertically on the rectangular (porous or non-porous) SiC setter plate, or spread a layer of paving (ZrO2) on the setter plate. 2 Beads or other ceramic powders) and then place the tubular ITO target body (such as figure 1 shown) to reduce shrinkage resistance during sintering. But the problem...

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Problems solved by technology

But the problem is that the sintering shrinkage rate of the tubular ITO target body in the vertical direction is quite different, because the lower part of the green body bears more weight than the upper part, and the sintering shrinkage is affected by the friction between the bottom of the green body and the contact surface of the setter plate. The shrinkage resistance of the whole body is different, showing that the shrinkage rate decreases in a gradient from top to bottom

Even if paving is used, the microsphere or spherical powder only plays the role of isolating the setter plate and reducing the contact area between the green body and the setter plate, which can reduce shrinkage resistance to a certain extent, but still cannot play a role in the sintering process. Synchronous shrinkage; in addition, the use of material paving during sintering is likely to cause uneven material paving, resulting in a decrease in the flatness of the tubular ITO target body, which affects the shape of the tubular ITO target to a certain extent, and also increases the preparation before sintering process

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