Monitoring method and system of magnetron sputtering ultra-clean room ventilation system based on Internet of Things

A technology of magnetron sputtering and ventilation system, which is applied in transmission system, air conditioning system, diversity/multi-antenna system, etc. It can solve the problems of no dust-free clean room and impossible mass production of sensitive parts.

Inactive Publication Date: 2020-08-14
蚌埠泰鑫材料技术有限公司
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  • Description
  • Claims
  • Application Information

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Problems solved by technology

Mass production of contamination-sensitive parts is impossible without a dust-free clean room

Method used

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  • Monitoring method and system of magnetron sputtering ultra-clean room ventilation system based on Internet of Things
  • Monitoring method and system of magnetron sputtering ultra-clean room ventilation system based on Internet of Things
  • Monitoring method and system of magnetron sputtering ultra-clean room ventilation system based on Internet of Things

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Embodiment Construction

[0020] The specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings, but it should be understood that the protection scope of the present invention is not limited by the specific embodiments.

[0021] Unless expressly stated otherwise, throughout the specification and claims, the term "comprise" or variations thereof such as "includes" or "includes" and the like will be understood to include the stated elements or constituents, and not Other elements or other components are not excluded. To explain some terms of the present invention, the present invention uses the terminology of base station transmitting beams. Those skilled in the art should know that antenna array technology and beamforming technology are well-known technologies. Multiple beams, for the base station, there are transmit beams and receive beams, and the mobile device also has transmit beams and receive beams, in order to specifically indicat...

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Abstract

The invention discloses a monitoring method of a magnetron sputtering ultra-clean room ventilation system based on the Internet of Things. The monitoring method comprises the following steps that a monitoring terminal with a wireless communication function monitors operation state parameters of the magnetron sputtering ultra-clean room ventilation system; a monitoring terminal monitors a synchronization signal for a first base station sent by the first base station on a plurality of base station transmission beams, and the monitoring terminal monitors a synchronization signal for a second basestation sent by the second base station on a plurality of base station transmission beams; the monitoring terminal monitorsfirst system information for the first base station sent by the first base station and second system information for the second base station sent by the second base station; and the monitoring terminal determines the RSRP of the synchronization signal for the first base station transmitted on each base station transmission beam in the plurality of base station transmission beams based on the synchronization signal for the first base station transmitted on the plurality ofbase station transmission beams by the first base station.

Description

technical field [0001] The invention relates to the monitoring of a magnetron sputtering clean room, in particular to a monitoring method and system for a magnetron sputtering ultra-clean room ventilation system based on the Internet of Things. Background technique [0002] Clean room (Clean Room), also known as clean room, clean room or clean workshop. It is the basis of pollution control. Mass production of contamination-sensitive parts is impossible without a dust-free clean room. [0003] Prior art CN103712298B An air conditioner that filters the air supplied to the clean room of semiconductor manufacturing equipment and controls the temperature and humidity, especially relates to a constant temperature and humidity for precise control of waste heat utilization and high efficiency clean room An air conditioner for an air conditioner that recovers waste heat discharged to the atmosphere from the existing air conditioning system, and adjusts humidity without supplying ad...

Claims

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Application Information

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IPC IPC(8): H04W56/00H04W74/08H04L29/08H04B7/06F24F11/56F24F3/16
CPCF24F11/56F24F3/167H04B7/06H04L67/12H04W56/001H04W74/0833
Inventor 王文爽沈文齐
Owner 蚌埠泰鑫材料技术有限公司
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