Sensor chip and force sensor device
A sensor chip, a force-applying technology, applied in measurement devices, microstructure devices, piezoelectric devices/electrostrictive devices, etc., can solve problems such as accuracy, productivity, difficulty in miniaturization of structures, and improve shaft separation. , the effect of improving the accuracy of the sensor
Active Publication Date: 2020-08-25
MINEBEA CO LTD
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- Description
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- Application Information
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Problems solved by technology
However, this force sensor device requires manual work to attach the strain gauges one by one, so there are problems in accuracy and productivity, and it is difficult to miniaturize the structure
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[0033] Hereinafter, means for implementing the present invention will be described with reference to the drawings. In each drawing, the same reference numerals are assigned to the same components, and overlapping descriptions may be omitted.
[0034] (Schematic structure of force sensor device 1)
[0035] figure 1 It is a perspective view illustrating the force sensor device of the first embodiment. figure 2 It is a perspective view illustrating the sensor chip and strain body of the force sensor device of the first embodiment. refer to figure 1 and figure 2 , the force sensor device 1 has a sensor chip 110 , a strain body 20 and an input / output substrate 30 . The force sensor device 1 is, for example, a multi-axis force sensor device mounted on a wrist, a finger, or the like of a robot used in a machine tool or the like.
[0036] The sensor chip 110 has a function of detecting a predetermined axial displacement at a maximum of 6 axes. The strain body 20 has the funct...
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Abstract
This sensor chip comprises: a base plate; first supporting portions; a second supporting portion around which the first supporting portions are disposed, and which is disposed at the center of the base plate; first detection beams linking the first supporting portions that are adjacent to one another; second detection beams which are provided between each of the first detection beams and the second supporting portion, parallel to each of the first detection beams; force application points to which a force is applied, disposed on the first detection beams; and a plurality of strain detecting elements disposed at prescribed positions on the first detection beams and the second detection beams. The plurality of strain detecting elements include a first detecting unit having a strain detectingelement capable of detecting a force in the first direction, and a second detecting unit having a strain detecting element which is capable of detecting a force in the first direction, and which is provided in a position symmetrical with the first detecting unit.
Description
technical field [0001] The invention relates to a sensor chip and a force sensor device. Background technique [0002] Conventionally, a force sensor device is known in which a plurality of strain gauges are attached to a strain body made of metal, and detects multiaxial force by converting deformation when an external force is applied into an electric signal. However, this force sensor device requires manual work to attach the strain gauges one by one, so there are problems in accuracy and productivity, and it is difficult to downsize the structure. [0003] On the other hand, a force sensor device has been proposed in which a strain gauge is replaced by a MEMS sensor chip for strain detection, thereby eliminating the problem of bonding accuracy and achieving miniaturization (for example, refer to Patent Document 1). [0004] prior art literature [0005] patent documents [0006] Patent Document 1: Japanese Patent No. 4011345 Contents of the invention [0007] The pr...
Claims
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IPC IPC(8): G01L5/167B81B3/00H01L29/84
CPCG01L1/18G01L5/162G01L1/2206G01L1/2287
Inventor 山口真也
Owner MINEBEA CO LTD