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Interval adjusting device of substrate processing unit and substrate processing device

A substrate processing device and substrate processing technology, applied in the fields of electrical components, semiconductor/solid-state device manufacturing, circuits, etc.

Active Publication Date: 2020-10-20
DMS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] The purpose of the present invention is to solve the existing problems, and the present invention provides an interval adjustment device for a substrate processing unit that can efficiently perform substrate processing by finely adjusting the position of the substrate processing unit facing the substrate

Method used

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  • Interval adjusting device of substrate processing unit and substrate processing device
  • Interval adjusting device of substrate processing unit and substrate processing device
  • Interval adjusting device of substrate processing unit and substrate processing device

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Embodiment Construction

[0032] Hereinafter, description will be made with reference to the accompanying drawings of preferred embodiments of the present invention that can concretely realize the problems to be solved above. In describing the present embodiment, the same names and the same reference numerals are used for the same structures, and additional explanations arising therefrom are omitted.

[0033] figure 1 is a perspective view for explaining the interval adjusting device according to the present invention, figure 2 yes figure 1 The exploded perspective view of image 3 is an exploded perspective view for explaining the structure provided with the interval adjusting device according to the present invention, Figure 4 is an illustrative side view for explaining the gap adjusting device according to the present invention, Figure 5 It is a figure for explaining the operation|movement of the space|interval adjustment apparatus which concerns on this invention.

[0034] First, the substr...

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Abstract

The invention provides an interval adjusting device of a substrate processing unit and a substrate processing device. The interval adjusting device can effectively perform substrate processing by finely adjusting the position of the substrate processing unit facing a substrate. The interval adjusting device is characterized by comprising a supporting block for supporting a substrate processing unit, and a lifting unit for lifting the support block. The lifting unit includes a main shaft rotated by receiving transmission of a driving force of a driving part; an eccentric shaft coupled to the main shaft in an eccentric state; a follow-up part arranged on the supporting block, wherein the follow-up part is in contact with the peripheral surface of the eccentric shaft and enables the supporting block to ascend and descend when the eccentric shaft rotates; a guide member that guides movement of the support block.

Description

technical field [0001] The present invention relates to an interval adjustment device of a substrate processing unit and a substrate processing apparatus using the same, and more particularly, to a substrate processing that can be performed more efficiently by adjusting the interval between a substrate and a substrate-facing substrate processing unit A gap adjusting device of a substrate processing unit in a process and a substrate processing device using the gap adjusting device. Background technique [0002] Substrates used to manufacture displays are manufactured through various types of substrate processing processes such as deposition, patterning, etching, chemical mechanical polishing, rinsing, and drying. [0003] In these various types of substrate processing processes, especially for the grinding, rinsing, drying and other processes for the substrate, it is preferentially required to perform substantial execution on the substrate grinding unit, substrate rinsing uni...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/68H01L21/67
CPCH01L21/68H01L21/67051H01L21/67259H01L21/68742H01L21/67046H01L21/67751H01L21/67126
Inventor 朴庸硕朴镐胤朴桓绪
Owner DMS CO LTD