Micro-nano Wrinkle Removal Method Based on Large-area Restoration Film Transfer-Heating Healing

Abstract

A micro-nano wrinkle removal method based on large-area repair film transfer-heating cure, using wafer-level repair layer film wet transfer technology, the uniform large-area PMMA film repair layer obtained by spin-coating germanium / graphene is accurate, Non-destructive transfer to the upper surface of the existing wrinkled patterned anthracene-containing copolymer-PDMS bilayer structure, combined with a multi-step low-temperature heating planarization process to fully remove the anthracene-containing copolymer-graphene / PMMA-PDMS multilayer during the wet transfer process The residual liquid and air introduced at the interface of the system make the transferred repair layer film fit well on the existing wrinkled surface, and use different surface layers to trigger critical strain conditions for different wrinkles, thereby achieving the effect of healing the existing wrinkle. The invention ensures the uniformity of the film thickness of the repair layer and the scale is at the wafer level; the multi-step low-temperature heating and planarization process can ensure sufficient conformal contact and interface bonding strength, and ensure a good wrinkle removal effect, which is suitable for solving human skin wrinkle removal , Wrinkle distortion problem in scanning electron microscope characterization process and large thin film wrinkle elimination technology in aerospace field.

Description

technical field [0001] The invention relates to a technology in the field of new aerospace materials, in particular to a method for eliminating micro-nano scale wrinkles in a hard film-soft base multilayer system based on wafer-level area repair layer film transfer-heating. Background technique [0002] The film structure is a flexible structure that can only resist tension but not compression under the action of external force, and is prone to local wrinkles caused by surface instability. Wrinkling behavior caused by local instability exists widely in nature and engineering technology, ranging from nano-folds of graphene films to micro-folds of human face skin, and even local folds in large aerospace membrane structures (solar sails, antennas, etc.). The appearance of the above-mentioned micro-nano wrinkle morphology greatly affects the mechanical, electrical, optical and thermal properties of materials, and also leads to the corresponding performance attenuation of micro-n...

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