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Filter and its manufacturing method, multiplexer, communication equipment

A filter and resonator technology, applied in the direction of impedance network, electrical components, etc., can solve problems affecting the performance of resonators, and achieve the effect of eliminating high-order resonance

Active Publication Date: 2021-06-01
ROFS MICROSYST TIANJIN CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, changes in the thickness ratio of the electrode layer and the piezoelectric layer will affect the performance of the resonator, such as loss characteristics, electromechanical coupling coefficient characteristics, etc.

Method used

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  • Filter and its manufacturing method, multiplexer, communication equipment
  • Filter and its manufacturing method, multiplexer, communication equipment
  • Filter and its manufacturing method, multiplexer, communication equipment

Examples

Experimental program
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Embodiment Construction

[0035]In the embodiment of the present invention, the thickness ratio of the electrode layer and the piezoelectric layer in the resonator is defined within a certain range, which can be used to eliminate the effects of high resonance, while controlling the insertion, bandwidth and other performance. The deterioration is in the acceptable range, and the following description will be described.

[0036]figure 2 A cross-sectional view of the resonator provided by the embodiment of the present invention.figure 2 As shown, the resonator includes a superimposed upper electrode 1, a piezoelectric layer 2, a lower electrode 3, and a substrate 4. In the embodiment of the present invention, the thickness ratio of the electrode layer and the piezoelectric layer ranges from 0.6 to 2.6, preferably 0.7 to 2.2, wherein the thickness of the electrode layer is the thickness of the upper electrode and the lower electrode.

[0037]image 3 A comparison graph for the suppression of the high-resonant resonance...

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Abstract

The invention relates to the technical field of filters, in particular to a filter, a manufacturing method thereof, a multiplexer, and a communication device. In this filter, the thickness ratio between the electrode layer and the piezoelectric layer of the resonator is limited within a certain value range. The filter with this structure can not only eliminate the influence of high-order resonance, but also control the insertion of the filter. The deterioration of performance such as loss and bandwidth is within an acceptable range.

Description

Technical field[0001]The present invention relates to the field of filters, and in particular, to a filter and a manufacturing method thereof, a multi-operator, a communication device.Background technique[0002]In recent years, the small-scaleization and high performance trends of communication equipment have been accelerated, and higher challenges are put forward to the radiofrequency front end. In the front end of the RF communication, in one hand, miniaturization is achieved by reducing the size of the chip and the package substrate, and on the other hand, better performance is achieved by reducing the loss source and a better resonator. In the existing filter structure, there is more configurations such as the need for improvement of specific properties such as rolling interpolation, and the like, where there is also a large introduction of more inductance, capacitance, coupling, and the like.[0003]A typical structure of a general filter such asfigure 1 Distancefigure 1 It is a s...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H03H3/02H03H9/54H03H9/70
CPCH03H3/02H03H9/54H03H9/70
Inventor 蔡华林庞慰
Owner ROFS MICROSYST TIANJIN CO LTD