A method for exposure positioning of objects

Abstract

The invention discloses an exposure positioning method of an object, which comprises placing an object stage carrying a plurality of exposure objects on a measuring stage, at least three marking points are set on the object stage, and the measuring stage measures each The coordinates of the first marked point in the first coordinate system of the measuring stage itself, and the first object coordinates of each exposure object in the first coordinate system; the object stage is moved to the exposure machine stage, and the exposure The machine measures to obtain the third mark point coordinates of each mark point in the third coordinate system of the exposure machine itself; The coordinates of the third object in the three-coordinate system; the exposure machine positions and exposes the exposure object according to the coordinates of the third object. The invention improves the exposure productivity and exposure precision of the exposure machine.

Description

technical field [0001] The invention relates to an object exposure technology, in particular to an exposure positioning method of an object. Background technique [0002] The size of the working stage of the existing exposure machine is about 600×700mm. However, the exposure positioning of small discrete objects (such as glass products: mobile phone covers, watch panels, etc.) less than 100mm or even less than 50mm in the market is relatively If the above-mentioned small-sized discrete objects are individually exposed, the productivity will be relatively low. [0003] In addition, the existing exposure machines mostly use mechanical measurement methods for exposure positioning of discrete small objects, and the accuracy is low. [0004] Therefore, it is necessary to make some improvements in view of the problems of low precision and low productivity in the exposure positioning method of the above-mentioned exposure machine for discrete small objects. SUMMARY OF THE INVENT...

AI Technical Summary

Problems solved by technology

[0002] The size of the working stage of the existing exposure machine is about 600×700mm. However, the demand for exposure positioning of discrete small objects smaller than 100mm or even smaller than 50mm (such as glass products: mobile phone covers, watch panels, etc.) More, if the above-mentioned small-sized discrete objects are exposed individually, the production capacity will be relatively low

[0003] In addition, the existing exposure machines mostly use mechanical measurement methods for the exposure positioning of discrete small objects, and the accuracy is low

[0004] Therefore, it is necessary to make some improvements to address the problems of low precision and low productivity in the exposure positioning method of the above-mentioned exposure machine for discrete small objects.

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