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A wedge amplitude modulation probe card amplitude modulation part and its docking structure

A probe card and wedge technology, which is applied in the field of probe cards and can solve problems such as the complexity of the drive structure of the probe card

Active Publication Date: 2022-04-12
MAXONE SEMICON CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In the production process of semiconductor devices, it is necessary to visit a large number of circuit contacts in one or more devices multiple times, and move the probe card through the moving mechanism to make the probes contact with the contacts. At the same time, to match the detection process For multiple sets of contacts in the probe card, multiple probe cards need to be set, and the probe card is fixed by the holder. The holder is a polyhedron that can rotate. By setting one or more probe cards on each surface, the When switching the probe card, by rotating the holder, the corresponding probe card is rotated to the top of the semiconductor device for detection, or multiple movable platforms are set up to move the probe card to realize the connection between the probe card and different contact groups. Matching, in the prior art, in order to realize the detection of multiple sets of contacts, the exchange of probe cards is used to achieve matching, and the matching is achieved by switching different probe cards. Since a single probe card cannot be used universally, the probe The driving structure of the needle card becomes complicated

Method used

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  • A wedge amplitude modulation probe card amplitude modulation part and its docking structure
  • A wedge amplitude modulation probe card amplitude modulation part and its docking structure
  • A wedge amplitude modulation probe card amplitude modulation part and its docking structure

Examples

Experimental program
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Effect test

Embodiment 1

[0059] This embodiment is an embodiment of a wedge amplitude modulation probe card.

[0060] combine figure 1 As shown, a wedge amplitude modulation probe card includes: a probe card main body 1, an upper wedge plate 2 and a lower wedge plate 3, and several upper wedge plates 2 and lower wedge plates 3 are slidingly arranged inside the probe card main body 1. Wedge 3, several upper wedges 2 and lower wedges 3 are alternately arranged in sequence; after the upper wedge 2 is moved down, the upper wedge 2 will push the lower wedge 3 below to the right, so that the lower wedge 3 Upper wedge 2 joins the queue of lower wedge 3.

[0061] combine figure 2 As shown, the probe card main body 1 includes: a main body frame 1-1, a probe groove 1-2 and an upper wedge plate groove 1-3, and several upper wedges are accommodated inside the main body frame 1-1 along the length direction. plate 2 and the lower wedge 3, and the bottom of the main frame 1-1 is provided with a probe slot 1-2 fo...

Embodiment 2

[0079] This embodiment is an embodiment of the main body of the wedge amplitude modulation probe card.

[0080] The main body of a wedge amplitude modulation probe card disclosed in this embodiment is applied to a wedge amplitude modulation probe card in the embodiment.

[0081] combine Figure 1 to Figure 3 As shown, a wedge amplitude modulation probe card body, the interior of the probe card body 1 is slidingly provided with several upper wedges 2 and lower wedges 3, and several upper wedges 2 and lower wedges 3 are sequentially spaced Arranged in a staggered manner; the probe card main body 1 includes: a main body frame 1-1, a probe groove 1-2 and an upper wedge plate groove 1-3, and several upper wedges are accommodated inside the main body frame 1-1 along the length direction plate 2 and the lower wedge 3, and the bottom of the main frame 1-1 is provided with a probe slot 1-2 for the probe to pass through along the length direction, and the main frame 1-1 is also provide...

Embodiment 3

[0085] This embodiment is an embodiment of a probe card wedge amplitude modulation method.

[0086] A probe card wedge amplitude modulation method disclosed in this embodiment is applied to the wedge amplitude modulation probe card disclosed in Embodiment 1.

[0087] combine Figure 4 and Figure 5 As shown, a probe card wedge amplitude modulation method includes the following steps:

[0088]Step a, determine the amplitude modulation distance: before the amplitude modulation, several upper wedges 2 are in side contact, and several lower wedges 3 are in contact with each other, and the upper wedge wedge 2-2 at the lower end of the upper wedge 2 is embedded in the two adjacent adjacent wedges below it. Between the lower wedge heads 3-2 of each lower wedge 3, the upper wedge probes 2-3 of each upper wedge 2 are located above the detection area 100, and the lower wedges of each lower wedge 3 The probes 3-3 are all located in the detection area 100, the upper wedge contact 2-4 o...

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PUM

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Abstract

The invention belongs to the technical field of probe cards, and in particular relates to a wedge amplitude modulation probe card amplitude modulation part and its docking structure. The block cylinder, sliding seat and shell of the briquetting disk, several briquetting disks are arranged side by side to slide on the briquetting disk rod to form a briquetting block, and several briquetting disks are all eccentrically arranged on the briquetting disk rod, and each briquetting disk The outside is fixedly sleeved with a briquetting disk ring, and the upper end of each upper wedge plate is provided with a briquetting disk ring groove, which can realize that after the briquetting disk rotates, it can be docked with the upper wedge plate through the briquetting disk ring. During the downward movement of the briquetting plate, the briquetting plate slides horizontally with the upper wedge plate, and keeps docking during the sliding process, which can ensure the stable sliding of the upper wedge plate. The briquetting plate can move independently, and can adapt to different horizontal moving distances of multiple upper wedges.

Description

technical field [0001] The invention belongs to the technical field of probe cards, and in particular relates to a wedge amplitude modulation probe card amplitude modulation part and its docking structure. Background technique [0002] With the development of the semiconductor industry, more and more electronic devices are connected to the semiconductor wafer. During the manufacturing process of the semiconductor device, the probe is contacted with the metal end on the semiconductor wafer to realize a temporary electrical connection. The electrical signal of the tester is transmitted to the semiconductor device through the probe, and the tester detects the electronic device on the semiconductor wafer through the returned electrical signal. [0003] The probe card is the link between the semiconductor wafer and the tester. By integrating multiple probes on the probe card, multiple probes can be simultaneously contacted with multiple semiconductor devices on the semiconductor ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R1/073
CPCG01R1/07307
Inventor 于海超周明
Owner MAXONE SEMICON CO LTD