Tungsten hexafluoride preparation device and method for improving utilization rate of raw materials

Abstract

The invention relates to a tungsten hexafluoride preparation device and method for improving the utilization rate of raw materials, and belongs to the technical field of tungsten hexafluoride preparation. The device comprises a recovery tank, a fluidized bed reactor, a purge gas pipe, a condenser, a collection tank, a compressor, a buffer tank, a fluorine-containing mixed gas tank and a feeding mechanism. Before tungsten hexafluoride preparation reaction, under the action of a gas homogenizing disc in the fluidized bed reactor, purge gas is uniformly blown out, purge gas purges the interior ofthe fluidized bed reactor and vacuumizes the fluidized bed reactor; during tungsten hexafluoride preparation, a material receiving disc can prevent tungsten powder from being deposited at the bottomof the fluidized bed reactor and incapable of participating in reaction, so that full reaction of the tungsten powder is guaranteed; besides, the tungsten powder is filtered through the filter disc and is prevented from entering the first pipeline along with gas, so that the utilization rate of raw materials is increased, and the purity of generated tungsten hexafluoride is high; after tungsten hexafluoride is prepared, pulse type reverse blowing is conducted through blowing gas of the blowing gas pipe, so that the tungsten powder attached to the filter disc is blown down and is recycled through the recycling tank, thereby reducing material waste.

Description

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AI Technical Summary

Benefits of technology

This patented technology allows for efficient use of waste material by collecting it into one container while also reusing them back onto another vessel after being separated. By opening an electromagnet's coil when there are no gases coming up during production or processing, the process becomes more effective because only certain types of metals (metal tungstates), such as tantalum nitride, remain within the system without getting trapped between different components.

Problems solved by technology

The technical problem addressed by this patented method relates to improving the efficiency of producing high-purity metallic tantalum (TUN) from tungstochloroarsenitride (TCN). Specifically, current methods involve reacting tungstate hydroxylamine with molybdenum oxychloride under specific conditions such as temperature, pressure, time, etc., leading to poor yield due to excessive formation of unwanted side products that may be harmful when stored inside electronic components like memories.

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