Automatic testing equipment for MEMS gyroscope

Abstract

The invention discloses automatic testing equipment for an MEMS gyroscope. The equipment comprises: an incubator which is internally provided with a test board; a plurality of MEMS gyroscopes to be tested, which are arranged on the test board; and an industrial personal computer connected with the temperature box and the test board. The industrial personal computer is used for sending a temperature adjusting command to the temperature box, and the temperature box adjusts the temperature according to the received temperature adjusting command until the temperature in the temperature box reaches a preset value; and the industrial personal computer is used for acquiring key information of the MEMS gyroscopes to be tested arranged on each channel, the key information comprises a Q value, a frequency difference and temperature coefficient information of each MEMS gyroscope to be tested, and the key information is processed to obtain a data file containing the Q values, the frequency differences and the temperature coefficients of all the MEMS gyroscopes to be tested. According to the invention, integrated acquisition and simple signal processing can be carried out on output signals of the plurality of MEMS gyroscopes, and the reject ratio of gyroscope products during shipment is reduced.

Description

technical field [0001] The invention relates to the technical field of gyroscope testing, in particular to a MEMS gyroscope automatic testing equipment. Background technique [0002] MEMS gyroscope is a low-cost, light and small new type of gyroscope, which is mainly used in consumer and other low-end commercial fields. It has made its debut in the high-end inertial system market, but its accuracy index and stability are far from those of some industrial and There is still a certain gap in the practical application of the tactical level. MEMS gyroscopes are being continuously improved. Through relevant technological breakthroughs, they can take advantage of their price advantages and their own characteristics, as a new generation of gyroscope products, and occupy the market in a short period of time. [0003] Q value and frequency difference are the key factors restricting the accuracy of the gyroscope. The Q value of the gyroscope head directly restricts the final accuracy...

AI Technical Summary

Problems solved by technology

[0003] Q value and frequency difference are the key factors restricting the accuracy of the gyroscope. The Q value of the gyroscope head directly restricts the final accuracy level of the gyroscope. When the environment changes, the temperature change of the gyroscope will cause the change of the mechanical parameters and damping coefficient of the gyroscope head, which will affect the accuracy of the gyroscope.

The traditional gyroscope performance test is to put a single gyroscope product in an incubator, manually set different temperature gradients, and then use another signal to stimulate the acquisition device for data acquisition and processing, which is inefficient and time-consuming.

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