Rapid large-dynamic-range wavefront detection device and method based on mode recovery
A technology with large dynamic range and wavefront detection, which is applied in the field of optical measurement, can solve problems such as long calculation time, complex device construction, and large sampling volume, and achieve the effects of improving calculation speed, reducing calculation amount, and avoiding system errors
Active Publication Date: 2021-04-09
ZHEJIANG UNIV
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[0004] Aiming at the problems of the existing iterative phase recovery method when measuring the large wavefront error of a large-aperture optical lens, the sampling amount is large, the calculation time is long, and the device is complicated to build, the present invention provides a fast and large dynamic range wavefront detection method based on mode restoration and Device, the specific technical scheme is as follows:
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[0024] The present invention will be described in detail below with reference to the accompanying drawings and preferred embodiments, and the purpose and effect of the present invention will become clearer. It should be understood that the specific embodiments described here are only used to explain the present invention and are not intended to limit the present invention.
[0025] Such as figure 1 As shown, the fast large dynamic range wavefront detection device based on mode restoration of the present invention includes a laser transmitter 1, a plano-convex lens 2, a beam expander 3, a lens to be tested 4 and an image sensor 5, along the direction of the forward optical path, The plano-convex lens 2 is located behind the laser emitter 1 with an inclination of 45 degrees, and the plane faces the laser emitter 1. The beam expander 3 and the flat lens to be measured 4 are sequentially arranged behind the plano-convex lens 2, and The plano-convex lens 2, the beam expander 3, the...
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The invention discloses a rapid large-dynamic-range wavefront detection device and method based on mode recovery. According to the method, high-speed large-dynamic-range wavefront detection is realized through replacing a diffraction calculation process with a semi-analytical diffraction basis function and solving a polynomial coefficient between diffraction surfaces through matrix operation iteration. The device comprises a laser, a plano-convex lens, a beam expander, a to-be-measured lens and an image sensor which are arranged in sequence. The diffraction basis function is calculated based on the semi-analytical diffraction theory, so that diffraction transmission process calculation using Fourier transform can be replaced; a polynomial coefficient solving on the diffraction surfaces is achieved through matrix operation; the method does not need to return to a measurement surface; and rapid and large-dynamic-range accurate wavefront detection can be achieved. According to the device, the plano-convex lens is used for replacing a reflector to achieve light path turning, and therefore, light path turning and light intensity attenuation are achieved, and in addition, due to the fact that the rear surface of the plano-convex lens is bent, reflected light of the rear surface does not return to an original light path any more, and interference is avoided.
Description
technical field [0001] The invention relates to the technical field of optical measurement, in particular to a fast and large dynamic range wavefront detection device and detection method based on mode restoration. Background technique [0002] With the advancement of modern technology, small-diameter grinding and turning tools based on computer control have made it possible to process large-diameter free-form surface components. Large-aperture free-form surface elements are widely used in high-power laser systems such as inertial confinement fusion. Due to the surface defects of the large-diameter optical lens itself and the processing errors left in the grinding process of small-sized processing tools, the wavefront emitted by the large-diameter optical lens is no longer an ideal wavefront. In powerful laser systems, surface errors of optical components can cause distortion of the focus spot, resulting in energy loss and damage to the laser system. Therefore, the detecti...
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Login to View More IPC IPC(8): G01J9/00
CPCG01J9/00G01J2009/002
Inventor 白剑赵磊费蕾侯晶
Owner ZHEJIANG UNIV