Mask plate, display panel, and mask plate manufacturing method
A manufacturing method and display panel technology, which are applied in semiconductor/solid-state device manufacturing, vacuum evaporation plating, coating, etc., can solve problems such as grasping errors, increased manufacturing costs, and display panel defects, and achieve improved efficiency and improved Alignment accuracy, easy to identify the effect of grasping
Active Publication Date: 2022-05-10
WUHAN TIANMA MICRO ELECTRONICS CO LTD
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Problems solved by technology
However, in the existing mask used to evaporate the organic material in the evaporation equipment to the designated position of the array substrate, it is easy to fail to recognize the exact position of the mask when the stretcher aligns the position during the stretching process, resulting in Picking errors, resulting in defective display panels formed after evaporation, increasing production costs
Method used
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[0022] Features and exemplary embodiments of various aspects of the invention will be described in detail below. In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without some of these specific details. The following description of the embodiments is only to provide a better understanding of the present invention by showing examples of the present invention.
[0023] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply that there is a relationship between these entities or operations. There is no such actual relationship or order between them. Furthermore, the term "comprises", "comprises" or any other variation thereof is i...
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The invention discloses a mask plate, a display panel and a method for manufacturing the mask plate. The mask plate includes: at least one mask strip; wherein, the mask strip includes a plurality of holes, and the plurality of holes are The mask strips are arranged along a first direction and extend along a second direction, the first direction intersects with the second direction, and the plurality of holes include a plurality of holes located at edge positions in the first direction edge holes, at least one of the plurality of edge holes is set as an alignment hole, and the mask strip includes an identification unit for identifying the alignment hole set in the edge holes. The mask plate, the display panel and the manufacturing method of the mask plate provided by the present application improve the netting accuracy of the manufactured mask plate when stretching the net, so as to improve the manufacturing precision and yield of the manufactured display panel.
Description
technical field [0001] The invention belongs to the technical field of display devices, and in particular relates to a mask, a display panel and a method for manufacturing the mask. Background technique [0002] At present, in the manufacturing process of display devices, a high-precision metal mask (Fine Metal Mask, FMM for short) is usually used as an evaporation mask, so that the luminescent material is evaporated on the corresponding opening position on the array substrate, thereby manufacturing to get the desired display panel. However, in the existing mask used to evaporate the organic material in the evaporation equipment to the designated position of the array substrate, it is easy to fail to recognize the exact position of the mask when the stretcher aligns the position during the stretching process, resulting in Picking errors lead to defects in the display panel formed after vapor deposition, which increases the production cost. Contents of the invention [00...
Claims
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IPC IPC(8): C23C14/04C23C14/24H01L27/32H01L51/00
CPCC23C14/042C23C14/24H10K59/353H10K71/164H10K71/166
Inventor 黄文科
Owner WUHAN TIANMA MICRO ELECTRONICS CO LTD