Debugging Method of Imaging Sensor Image Plane Parallelism Based on Microscopic Measurement

Abstract

The invention relates to a method for assembling and adjusting an imaging sensor, in particular to a method for adjusting the image plane parallelism of an imaging sensor based on microscopic measurement, so as to solve the problem that the direct measurement method will scratch or damage the protective glass when adjusting the image plane parallelism of the existing imaging sensor. , and the debugging accuracy is poor, and the defocus image quality blur of the imaging measurement method is not conducive to accurate calculation, and the technical problem of heavy workload. The debugging system includes an eccentric air floating platform, a four-dimensional adjustment table, auxiliary tooling, an eccentric imaging microscope and a dial indicator; the sensor assembly to be debugged is installed on the four-dimensional adjustment platform, and the eccentric imaging microscope is set on the positive side of the sensor assembly to be debugged. above. The debugging method based on the above debugging system includes: leveling the eccentric air-floating platform; leveling the mounting flange of the sensor assembly to be debugged; testing the values ​​of three points of the imaging sensor with an eccentric imaging microscope, and calculating the deviation value; correcting the pad according to the deviation The thickness of the column.

Description

technical field [0001] The invention relates to an installation and adjustment method of an imaging sensor, in particular to an imaging sensor image plane parallelism debugging system and method based on eccentricity meter microscopic measurement. Background technique [0002] Imaging sensors include CMOS, CCD, etc., which are installed at the back end of the optical lens of the star sensor to image the star target. The photosensitive image surface of the imaging sensor should be perpendicular to the optical axis in theory, and the imaging quality can be guaranteed only with a high installation accuracy index. with precision. [0003] The image surface of the imaging sensor is generally square or rectangular. The optical lens of the star sensor requires that the imaging quality must be guaranteed at each position of the image surface of the imaging sensor in different fields of view. For an optical lens with a large numerical aperture, the inclination of the image plane of ...

AI Technical Summary

Problems solved by technology

[0007] The purpose of the present invention is to solve the problem that the direct measurement method will scratch or damage the protective glass when debugging the parallelism of the image plane of the existing imaging sensor, and the non-parallel of the protective glass and the image plane leads to poor debugging accuracy, while the imaging measurement method has a large inclination Due to the blurred image quality when out of focus, which is not conducive to accurate calculation, and the technical problems of large debugging workload, a system and method for debugging the image plane parallelism of imaging sensors based on microscopic measurement are proposed. Based on the microscopic measurement technology of eccentricity meter, only the debugging sensor Components are measured, realizing non-contact measurement and digital measurement, greatly improving the efficiency of assembly and debugging, and ensuring batch quality

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