The invention provides a
grating displacement sensor, and relates to the technical field of ultra-precision measurement, the
grating displacement sensor comprises a
grating displacement sensor reading part, a grating part and a preposed
data processing part, and the grating displacement sensor reading part is connected with the grating part and the preposed
data processing part; the front
data processing component is used for emitting an initial
light beam; the grating displacement sensor reading part is used for scanning the grating part according to the initial
light beam and determining a target
light beam carrying displacement information; the grating displacement sensor reading part is also used for performing
signal conversion on the target light beam to obtain a grating displacement
electric signal; the front data
processing component is also used for correcting the grating displacement
electric signal to obtain a target grating displacement
signal; the target grating displacement
signal is used for realizing displacement measurement of a grating displacement sensor reading part and a grating part. According to the technical scheme, the influence of thermal
power consumption caused by heating of the
light source power supply circuit and the
light source on the grating displacement sensor reading part can be effectively reduced.