The invention relates to an installation and adjustment method of an imaging sensor, particularly relates to an imaging sensor
image plane parallelism debugging
system and method based on microscopic measurement, and aims to solve the problems that when the
image plane parallelism of an existing imaging sensor is debugged, protective glass is scratched or damaged by a direct measurement method, the debugging precision is poor, the out-of-focus
image quality of an imaging measurement method is fuzzy so that accurate calculation is not facilitated, and a
workload is large. The debugging
system comprises an eccentric instrument air
floating platform, a four-dimensional adjusting table, an auxiliary tool, an eccentric instrument imaging
microscope and a dial indicator. A to-be-debugged sensor
assembly is installed on the four-dimensional adjusting table, and the eccentric instrument imaging
microscope is arranged right above the to-be-debugged sensor
assembly. The debugging method based on the debugging
system comprises the following steps: leveling the eccentric instrument air
floating platform; leveling a mounting
flange of the to-be-debugged sensor
assembly; testing numerical values of three points of the imaging sensor by using the eccentric instrument imaging
microscope, and calculating a deviation value; and correcting the thickness of a
cushion column according to the deviation.