Integrated micro gas absorption cell

A gas absorption cell and absorption cell technology, applied in instruments, measuring devices, scientific instruments, etc., can solve the problems of high cost, difficult coupling and alignment, and bulky volume, so as to reduce packaging time and cost, and reduce mutual alignment. The effect of difficult, highly sensitive gas sensing

Active Publication Date: 2022-04-29
杭州纳境科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The current gas absorption cell technology is mainly based on the traditional White cell, Herriott cell and other forms. The reflectors, lenses and other components of these gas absorption cells are separated, the coupling and alignment are difficult, and the volume is large, and the gas in and out speed It is also relatively limited; in addition, this also brings problems such as high cost and poor stability to the current gas absorption cell, which limits the large-scale deployment of gas detection technology
Therefore, the biggest problem of gas absorption cell technology is how to achieve miniaturization and high-precision, low-cost packaging to produce stable, reliable, and low-cost gas absorption cells and break the application bottleneck

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 2

[0037] An integrated miniature gas absorption cell, the structure of which is as follows image 3 As shown in (A), the structure of the top plate 002 / bottom plate 004 is as follows figure 2 As shown, the integrated mirror-micro-nano lens components are as follows figure 1 shown. The difference from Embodiment 1 is that the light source and the detector adopt the large-scale equipment equipped with the large-scale gas spectrum analyzer commonly used at present, and are separated from the gas absorption cell.

[0038] Such as figure 1 As shown, a mirror 102 and a metasurface lens 103 are prepared on one side of a transparent substrate 101, and an anti-reflection film 104 is prepared on the other side, forming a mirror-micro-nano lens integrated component of a gas absorption cell. The transparent substrate 101 is made of a hard material that does not produce material absorption loss for the laser used in gas sensing; the reflector 102 can be composed of a multi-layer high ref...

Embodiment 3

[0042] The difference from the structure of the absorption pool in Example 2 is that the two mirror-micro-nano lens integrated components adopt an asymmetric combined structure, and the overall structure is shown in Figure 5 (A), Figure 5 (B) is light in Figure 5 (A) Schematic diagram of the transport process in the gas absorption cell (along Figure 5 (A) The cross-section of C-C is cut, and the working principle of the device is shown in the cross-sectional structure). For light incident and exit, the micro-nano lenses are arranged at both ends of one of the integrated components, and mirrors are prepared on the two components (except where the micro-nano lenses are located). The laser light enters the gas absorption pool through one of the micro-nano lenses, and exits from the other micro-nano lens after multiple reflections in the pool.

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Abstract

The invention discloses an integrated miniature gas absorption cell, which includes a top plate, a bottom plate, two mirror-micro-nano lens integrated elements and two sealing plates arranged between the top plate and the bottom plate; the top plate and the bottom plate Ventilation holes are opened on the bottom plate; the two reflector-micro-nano lens integrated components are composed of a transparent substrate, a metasurface lens and a reflector arranged on the front of the transparent substrate, and an anti-reflection film arranged on the back of the transparent substrate. The transparent substrate The front faces to the inside of the absorption pool; two mirror-micro-nano lens integrated components are arranged opposite to each other, and the two metasurface lenses are staggered from each other, and an adjustable laser and a detector are respectively arranged outside the metasurface lens. The two metasurface lenses can also be arranged on any one of the two mirror-micro-nano lens integrated elements. The present invention can effectively solve the problems of large volume, high cost, and difficulty in high-precision alignment and packaging of the current gas absorption pool because each key optical element is separated.

Description

technical field [0001] The invention belongs to the field of gas detection, and relates to a gas detection and concentration analysis device, in particular to an integrated miniature gas absorption cell. Background technique [0002] The analysis of gas types and concentrations has a wide range of applications in many fields such as home, security, quality inspection, and scientific research. Since each molecule has different characteristic absorption peaks for light, spectral analysis has become a powerful method for qualitative and quantitative analysis of gases. Gas absorption cell is a common tool for detecting gas composition by spectral analysis. The gas to be measured is passed into the gas absorption cell, and a laser beam is introduced into the gas absorption cell to pass through the gas to be measured and interact with the gas to be measured. After that, the laser is received by a detector or a spectrometer, and the received light is analyzed The spectrum and int...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/03
CPCG01N21/03G01N21/0303G01N2021/0339G01N2021/0346
Inventor 林宏焘马耀光李兰李钧颖
Owner 杭州纳境科技有限公司
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