A metamaterial modulator

A technology of modulators and metamaterials, which is applied in the direction of instruments, antennas, electrical components, etc., can solve the problems of inflexible modulation effects and single modulation performance, and achieve the effects of rich and flexible modulation, high modulation depth, and wide modulation bandwidth

Active Publication Date: 2022-07-12
JIANGSU UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to provide a metamaterial modulator with the function of modulating the amplitude and resonance frequency at the same time, so as to solve the problems of single-material modulators with single modulation performance and inflexible modulation effect

Method used

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Embodiment 1

[0056] like figure 1 As shown, an embodiment of the present invention provides a metamaterial modulator, which includes a surface layer 1, a graphene layer 2, a first flexible dielectric layer 3, a perovskite layer 4, a metal structure arranged from top to bottom layer 5, second flexible dielectric layer 6 and underlying substrate layer 7;

[0057] The second flexible dielectric layer 6 is attached to the upper surface of the underlying substrate layer 7 , the metal structure layer 5 is attached to the upper surface of the second flexible dielectric layer 6 , the perovskite layer 4 covers the metal structure layer 5 , and the first flexible dielectric layer 3 It is attached to the upper surface of the perovskite layer 4 , the graphene layer 2 is attached to the upper surface of the first flexible medium layer 3 , and the surface layer 1 is attached to the upper surface of the graphene layer 2 .

[0058] The metal structure layer 5 is composed of several metal structures, and ...

Embodiment 2

[0078] like Figure 7 As shown, an embodiment of the present invention provides a method for preparing a metamaterial modulator, the method comprising:

[0079] S1, prepare a layer of high-resistance silicon layer as the bottom substrate layer 7 .

[0080] A 500 μm thick high-resistance silicon layer was prepared.

[0081] S2, spin-coating polyimide on the underlying substrate layer 7, the specific steps include:

[0082] Spin coating 10μm thick polyimide film on 500μm high resistance silicon: After cleaning the prepared high resistance silicon, spin coating a polyimide solution with a viscosity of 3600 (centipoise) on the polished surface, and the spin coating time is 60 seconds at 2200RPM. Then, the polyimide solution was baked, and the baking temperature was 120° C., 200° C. and 230° C. for 1 hour each, and then continued to bake at 250° C. for 2 hours.

[0083] S3, spin-coating photoresist on the polyimide, and prepare the metal structure layer 5 by using a photolithogra...

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Abstract

The invention relates to a metamaterial modulator, comprising a surface layer, a graphene layer, a first flexible dielectric layer, a perovskite layer, a metal structure layer, a second flexible dielectric layer and an underlying substrate layer arranged from top to bottom; The structural layer is composed of several metal structures. During the modulation process, the electrical conductivity of the graphene layer and the perovskite layer is changed due to the incidence of laser light, and the incident terahertz wave is regulated twice. At the same time, the graphene layer and the surface layer have electrodes, thereby It is also possible to conduct multi-material optoelectronic joint regulation of terahertz waves through electric fields. During the modulation process, the metal structure interacts with terahertz waves to generate resonance, increasing the modulation depth.

Description

technical field [0001] The invention relates to the technical field of novel dynamic modulation terahertz wave metamaterials, in particular to a metamaterial modulator with functions of simultaneously modulating amplification and resonance frequency. Background technique [0002] Metamaterials are composed of artificial metastructures with subwavelength size through periodic arrangement, and they have unique electromagnetic properties that natural materials do not have. The geometries of the artificially designed cell structures have unique optical responses to electromagnetic waves. In recent years, artificial metamaterials have become the focus of the development of unconventional optical devices. With the pursuit of more diverse functions, the functional diversification of metamaterials continues to expand into the field of dynamic tunability. The field of optoelectronically regulated graphene perovskite metamaterials is a key area for enhancing optical responses. In t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02F1/03H01Q15/00
CPCG02F1/0305G02F1/0316G02F1/0327H01Q15/0086H01Q15/0026H01Q15/002Y02E10/549
Inventor 杨茂生梁兰菊闫昕姚海云韦德泉王猛
Owner JIANGSU UNIV
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