Unlock instant, AI-driven research and patent intelligence for your innovation.

Non-sealed butterfly valve and method for producing the same

A non-hermetic, butterfly valve technology, used in semiconductor/solid-state device manufacturing, valve lifters, valve devices, etc., to achieve the effect of improving accuracy

Active Publication Date: 2021-08-03
CKD
View PDF5 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, in the orifice 150, the ridgeline between the inner peripheral surface of the flow path 130 and the maximum outer diameter portion 109a predominantly functions as an orifice, and the arc portion 109b other than the maximum outer diameter portion 109a and the Compared with the maximum outer diameter portion 109a, it does not function effectively as an orifice

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Non-sealed butterfly valve and method for producing the same
  • Non-sealed butterfly valve and method for producing the same
  • Non-sealed butterfly valve and method for producing the same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0050] While referring to the attached Figure 1 Embodiments of the non-hermetic butterfly valve of the present invention will be described in detail.

[0051] Such as figure 1 As shown, the non-hermetic butterfly valve 1 according to this embodiment is arranged on the piping 34 connecting the vacuum chamber 32 and the vacuum pump 33 in the semiconductor manufacturing process, and is used as a vacuum valve supplied with gas from the gas supply source 37 . A vacuum pressure control device that controls the pressure of the chamber 32.

[0052] figure 2 It is a cross-sectional view of the non-hermetic butterfly valve 1 according to the present embodiment, cut in a direction parallel to the axis RA of the rotating shaft 11 a and parallel to the flow path 30 . also, image 3 This is a cross-sectional view of the non-hermetic butterfly valve according to this embodiment, cut in a direction parallel to the axis RA of the rotating shaft 11 a and perpendicular to the flow path 30...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to a non-sealed butterfly valve and a method for producing the same. The invention provides a non-sealed butterfly valve capable of preventing drastic release of gas from a vacuum chamber and a method for producing the non-sealed butterfly valve that makes it easy to enhance the accuracy of the mounting position of a butterfly valve element. In the non-sealed butterfly valve, a butterfly valve element (9) includes a downstream end face (9d) that faces a downstream side of a flow passage (30) during valve closing and a maximum outer diameter portion (9b) that makes a gap (G) with a minimum distance. The butterfly valve element includes a first chamfered portion (9f) that reduces the diameter of the butterfly valve element (9) from the maximum outer diameter portion (9b) to the downstream end face (9d) over the entire circumference. The first chamfered portion (9f) has an angle (theta) of 5 degrees or less relative to the thickness direction of the butterfly valve element (9). The first chamfered portion (9f) and the downstream end face (9d) intersect each other at a ridge line (RL1) that falls within an imaginary circle (VC) that is centered on the central axis (XL) of the butterfly valve element and passes the maximum outer diameter portion (9b).

Description

technical field [0001] The present invention relates to a non-hermetic butterfly valve and a manufacturing method thereof. The non-hermetic butterfly valve is arranged on a pipe connecting a vacuum chamber and a vacuum pump, and controls the vacuum pressure of the vacuum chamber. The non-hermetic butterfly valve has: a flow path ; the connecting rod, which is arranged in the direction perpendicular to the flow path; and the disc-shaped butterfly valve body, which is combined with the connecting rod, and rotates with the rotation of the connecting rod centering on the axis, thereby completing the flow path When the valve is closed, there is a specified gap between the inner peripheral surface of the flow path and the outer peripheral surface of the butterfly valve body. Background technique [0002] Conventionally, in the semiconductor manufacturing process, a butterfly valve with a high conductance is arranged between the vacuum chamber and the vacuum pump as a vacuum pressu...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): F16K1/22F16K1/32F16K27/02F16K31/04F16K37/00F16K49/00
CPCF16K1/22F16K1/32F16K27/0218F16K31/041F16K37/005F16K49/002F16K1/221F16K1/222F16K51/02F16K2200/40F16K1/36H01L21/67017
Inventor 西村康典
Owner CKD