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Mask assembly and method for manufacturing of the same

A mask component and mask technology, which is applied in semiconductor/solid-state device manufacturing, electrical components, electric solid-state devices, etc., can solve the problems of size limitation and increase of mask component size, etc.

Pending Publication Date: 2021-08-13
SAMSUNG DISPLAY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] At the same time, as the substrates used to fabricate organic light-emitting displays become larger, the size of mask components also increases
However, the size of the equipment used to manufacture the mask assembly may have size limitations

Method used

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  • Mask assembly and method for manufacturing of the same
  • Mask assembly and method for manufacturing of the same
  • Mask assembly and method for manufacturing of the same

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Embodiment Construction

[0059] Herein, the present invention will now be described more fully with reference to the accompanying drawings, in which some example embodiments of the invention are shown. However, this invention may be embodied in different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

[0060] It will also be understood that when a layer is referred to as being "on" another layer or substrate, it can be directly on the other layer or substrate, or one or more intervening layers may also be present. Throughout the specification, the same reference numerals designate the same or similar components. The shapes, dimensions, ratios, angles, numbers, etc. disclosed in the drawings for describing the embodiments may be examples, and the present invention is not limited to the illustrated ...

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Abstract

A mask assembly and method for manufacturing of the same are provided. A mask assembly includes: a mask frame including a first mask opening and a second mask opening which are located side by side in a first direction and defined by a support bar; a first split mask overlapping the first mask opening; and a second split mask overlapping the second mask opening, and the first split mask and the second split mask are spaced apart from each other in a region overlapping the support bar.

Description

technical field [0001] Aspects of embodiments of the present disclosure relate to mask assemblies and methods for manufacturing mask assemblies. Background technique [0002] As flat panel displays, liquid crystal displays (LCDs) and organic light emitting displays (OLEDs) are widely used. A flat panel display includes a metal layer having a specific pattern, and in the case of an organic light emitting display, an organic light emitting layer having a specific pattern is formed for each pixel. As a method of forming the metal layer and the organic light emitting layer, a deposition method using a mask assembly can be employed. [0003] The mask assembly includes a mask having an opening corresponding to a pattern of the metal layer or the organic light emitting layer and a mask frame supporting the mask. In the split mask method, a mask is divided into a plurality of split masks having a rod shape or a strip shape, and each split mask is welded to Mask frame to fix. The...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C23C14/24H01L51/56
CPCC23C14/042C23C14/24H10K71/164H10K71/166G03F7/12H01L21/683C23C16/042H10K71/00
Inventor 金世一李尚玟金義圭白大源
Owner SAMSUNG DISPLAY CO LTD