Cavity detection method for 3D NAND memory
A technology for void detection and memory, which is applied in semiconductor/solid-state device testing/measurement, electric solid-state devices, semiconductor devices, etc., can solve problems such as leakage, affecting the yield rate of 3D NAND memory products and production efficiency, etc., to prevent abnormal leakage and improve The effect of production efficiency and product yield
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[0014] Next, the technical scheme in the present application embodiment will be described in the present application, and it is understood that the described embodiments are intended to be described herein, not all of the embodiments of the present application. Based on the embodiments of the present application, all other embodiments to those of ordinary skill in the art without paying creative work at the obtained fall within the scope of the present application.
[0015] Description of the present application, the terms "first," "second," etc. are used to distinguish between different objects, and not for the number of technical features specified in the specific order indicated or described, further, the terms "upper", "inner location or position indicated by the relationship "," outer "," top "," bottom "," thickness "as the orientation or positional relationship shown in the accompanying drawings, description is merely for convenience and to simplify the description of the p...
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