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Probe station for chip testing

A technology of chip testing and probe station, which is applied in electronic circuit testing, components of electrical measuring instruments, measuring electricity, etc., can solve problems such as inconsistency, unstable test data, fatigue of probe station, etc., and achieve fatigue elimination problems, eliminate small rotational offsets, and improve stability

Active Publication Date: 2022-03-15
STELIGHT INSTR CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Based on the above findings, the object of the present invention is to provide a probe station for chip testing, which solves the problem of unstable test data and problems caused by the fatigue of the probe station during long-term use. inconsistencies

Method used

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  • Probe station for chip testing
  • Probe station for chip testing
  • Probe station for chip testing

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0030] Example 1: A probe station for chip test, including the body 1, a support plate 2 located below the body 1, a probe 51 and a moving point contact probe 31, which is in contact with the chip to be tested, the probe 51. The moving point contact probe 31 is attached to both ends of the support plate 2, and the middle portion of the support plate 2 is connected to the body 1, and the lower end surface side of the body 1 is provided with one side. The static contact probe 32 corresponding to the moving point contact probe 31 and corresponds to the moving point contact probe 31;

[0031]A first pin shaft 9 perpendicular to the length direction of the support plate 2 is mounted above the support plate 2 to the support plate 2, located between the probe 51 and the second elastic member 23, located at the lower end of the body 1 A second pin shaft 11 and a third pin shaft 12 parallel to the first pin shaft 9 are provided on the lower bumps 10, and the second pin shaft 11, the third ...

Embodiment 2

[0034] Example 2: A probe station for the chip test, including the body 1, the support plate 2 below the body 1, is used to contact the probe 51 and the moving point contact probe 31 in contact with the chip to be tested, the probe 51. The moving point contact probe 31 is attached to both ends of the support plate 2, and the middle portion of the support plate 2 is connected to the body 1, and the lower end surface side of the body 1 is provided with one side. The moving point contact probe 32 is located above the moving point contact probe 31, and when the probe is in contact with the chip to be tested, the moving point contact probe rotates away from the static contact probe, moving, static point The contact probe becomes the initial state of the mutual contact, and the control system of the chip test receives the moving, the stationary contact of the probe is separated from each other, and performs power-on operation to electrically conduct the probe and the chip electrically, ...

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Abstract

The invention discloses a probe station for chip testing, which includes a body, a support plate located below the body, a probe for contacting with a chip to be tested, and a moving point contact probe. The probe and the moving point contact probe are respectively Installed on both ends of the support plate, the middle part of the support plate and the body are connected by a vertically arranged second elastic member, and a first pin shaft perpendicular to the length direction of the support plate is installed on the support plate through an adapter The area above the board is located between the probe and the second elastic member. The lower end of the first elastic member in a stretched state is connected to the first pin shaft. The upper end of the first elastic member is connected to the body and is located in the second pin. The shaft and the fourth pin shaft above the third pin shaft are connected so that the respective moving rings of the first bearing, the second bearing, the third bearing and the fourth bearing are kept in press contact with the outer circumferential surface of the first pin shaft. The invention solves the problem of unstable and inconsistent test data during long-term use caused by the fatigue of the probe station.

Description

Technical field [0001] The present invention relates to a probe station for chip test, belonging to the technical field of chip test. Background technique [0002] In the production test link of the optical communication industry laser, the photoelectric performance test of a single laser chip (LD) is required before the COC aging process, in order to perform screening of laser chip (LD) performance before aging, and performance There is a problem with the laser in advance, thereby increasing the overall yield after the aging of CoC. [0003] During the test of the single laser chip (LD) of optical communication, the stability of the probe plays a very important role. Since the single chip size is very small (generally in the range of 300μm), the test probe is in the process of contact, or more Or less the position or angle offset of the chip, once there is a change in the position and angle of the chip, it will directly affect the stability and test efficiency of the subsequent ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R31/28G01R1/067
CPCG01R1/06711G01R31/2601
Inventor 黄建军吴永红赵山胡海洋
Owner STELIGHT INSTR CO LTD
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