Six-axis double-camera imager
A dual-camera and imager technology, applied in the field of testing equipment, can solve the problems of affecting measurement accuracy, low measurement efficiency, time-consuming and labor-intensive, etc., and achieve the effect of high use value
Pending Publication Date: 2021-11-05
昆山世纪三友测量技术有限公司
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Problems solved by technology
[0002] As we all know, the four side features of the semiconductor wafer storage box need to be measured after production, but the traditional imager can only measure one side of the product, and the operator needs to move the product back and forth during the measurement process. The side can only be measured by inversion, which is time-consuming and laborious; not only that, the personnel switching back and forth to the direction of the product will affect the measurement accuracy; moreover, the storage box is made of plastic, and the contact method will cause slight deformation of the product, and the measurement efficiency is not good. high
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[0019] refer to Figure 1-2 , a six-axis dual-camera imager, including a frame 10, a housing 160 mounted on the frame, a nitrogen gas spring 20, a support table 40 with a relief groove A30 formed in the middle, a Z-axis servo drive module 120, and a The rotary drive platform 60 on the back of the Z-axis servo drive module, two XY-axis drive mechanisms and two detection mechanisms 90, and a relief groove B170 is formed on the surface of the shell, and the nitrogen spring passes through the relief groove A and is fixed to the rotary drive platform , the Z-axis servo drive module partially passes through the relief slot A and is connected to the support platform by setting the base 130. During the assembly process, the Z-axis servo drive module is connected to the rotating drive platform through the connecting frame 50, and the connecting frame is connected to the rotating drive platform. Nitrogen spring connection setting, in the specific installation, the base is specifically m...
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The invention discloses a six-axis double-camera imager which comprises a rack, a shell installed on the rack, a nitrogen spring, a supporting table with a receding groove A formed in the middle, a Z-axis servo driving module, a rotary driving platform installed on the back of the Z-axis servo driving module, two XY-axis driving mechanisms and two detection mechanisms. The nitrogen spring penetrates through the receding groove A to be fixedly connected with the rotary driving platform, the Z-axis servo driving module partially penetrates through the receding groove A and is connected with the supporting table through the arranged base, the two XY-axis driving mechanisms are arranged on the portions, corresponding to the two opposite sides of the receding groove A, of the supporting table correspondingly, and the two detection mechanisms are connected to the two XY-axis driving mechanisms correspondingly. Detection mechanisms are arranged on the two sides of the supporting table and can synchronously work in real time, meanwhile, a product can be driven to rotate by 90 degrees through the rotary driving product table, the supporting table can be driven to ascend and descend through the upper Z-axis servo driving module, the height of the product can be measured, and high use value is achieved.
Description
technical field [0001] The invention relates to the technical field of detection equipment, in particular to a six-axis dual-camera imager. Background technique [0002] As we all know, the four side features of the semiconductor wafer storage box need to be measured after production, but the traditional imager can only measure one side of the product, and the operator needs to move the product back and forth during the measurement process. The side can only be measured by inversion, which is time-consuming and laborious; not only that, the personnel switching back and forth to the direction of the product will affect the measurement accuracy; moreover, the storage box is made of plastic, and the contact method will cause slight deformation of the product, and the measurement efficiency is not good. high. Contents of the invention [0003] Purpose of the invention: In order to solve the deficiencies in the background technology, the present invention discloses a six-axis ...
Claims
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IPC IPC(8): G01D21/00G01D11/00G01D11/16G01D11/24B25H1/00
CPCG01D21/00G01D11/00G01D11/16G01D11/24B25H1/00
Inventor 谢锡洋谢锡良杨健代凯何玉陈
Owner 昆山世纪三友测量技术有限公司