Two-dimensional piezoelectric positioning table with large stroke
A technology of positioning platform and large stroke, applied in the direction of piezoelectric effect/electrostrictive or magnetostrictive motors, electrical components, generators/motors, etc., which can solve the problem of small loading area, small effective stroke area, and coupling error Large and other problems, to achieve the effect of compact space structure, increase the usable loading area, and achieve rigidity balance
Active Publication Date: 2021-11-19
HEFEI UNIV OF TECH
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[0006] In order to solve the problems of small stroke, small loading area, relatively small effective stroke area, and large coupling error of the above-mentioned traditional piezoelectric positioning platform, the present invention provides a two-dimensional piezoelectric positioning platform with large stroke
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[0039] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
[0040] see figure 1 , a large-stroke two-dimensional piezoelectric positioning table includes a base plate 1, a piezoelectric positioning table 2, a loading platform 3 and a preloading mechanism. The piezoelectric positioning stage 2 is fixedly installed on the base plate 1 , and the object stage 3 is fixedly installed on the top surface of the piezoelectric positioning stage 2 . The pre-tightening mechanism includes a first pre-tigh...
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The invention discloses a two-dimensional piezoelectric positioning table with a large stroke and a large effective stroke area ratio, and belongs to the technical field of piezoelectric driving. The two-dimensional piezoelectric positioning table comprises a bottom plate, a piezoelectric positioning table, a loading platform and a pre-tightening mechanism; the pre-tightening mechanism comprises a first pre-tightening mechanism and a second pre-tightening mechanism which are respectively arranged on the bottom plate on the corresponding side edges of the piezoelectric positioning tables of the two displacement amplification mechanisms; the piezoelectric positioning table comprises a carrying platform frame, a first displacement amplification mechanism, a first decoupling mechanism, a second displacement amplification mechanism and a second decoupling mechanism; and the first displacement amplification mechanism and the first decoupling mechanism form a group to realize the displacement output of the piezoelectric positioning table in the Y direction, and the second displacement amplification mechanism and the second decoupling mechanism form a group to realize the displacement output of the piezoelectric positioning table in the X direction. Through the structural design of the two displacement amplification mechanisms, the overall amplification ratio reaches 14.4; and by adjusting mechanical mechanism parameters of the two decoupling mechanisms, the coupling error of the piezoelectric positioning table in the X direction and the Y direction is reduced to 0.35%.
Description
technical field [0001] The invention belongs to the technical field of piezoelectric driving, and in particular relates to a large-stroke two-dimensional piezoelectric positioning stage. Background technique [0002] Piezoelectric positioning stage is a mechanical structure that uses piezoelectric drive technology to achieve precise positioning. Using the inverse piezoelectric effect of the piezoelectric ceramics, the piezoelectric ceramics can generate tiny displacements after being excited by electricity, so as to achieve precise positioning. [0003] The current piezoelectric positioning stage can be divided into single degree of freedom and multiple degrees of freedom according to the classification of degrees of freedom, and can be divided into direct drive type and amplification type according to whether there is a displacement amplifying mechanism. Because the electrostrictive deformation of piezoelectric ceramics is usually one-thousandth of the thickness of the cer...
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IPC IPC(8): H02N2/04
CPCH02N2/04H02N2/043
Inventor 潘巧生汪权陈立蔚李英豪黄梓良李瑞君张连生黄强先
Owner HEFEI UNIV OF TECH
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