Two-dimensional piezoelectric positioning table with large stroke
A technology of positioning platform and large stroke, applied in the direction of piezoelectric effect/electrostrictive or magnetostrictive motors, electrical components, generators/motors, etc., which can solve the problem of small loading area, small effective stroke area, and coupling error Large and other problems, to achieve the effect of compact space structure, increase the usable loading area, and achieve rigidity balance
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[0039] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
[0040] see figure 1 , a large-stroke two-dimensional piezoelectric positioning table includes a base plate 1, a piezoelectric positioning table 2, a loading platform 3 and a preloading mechanism. The piezoelectric positioning stage 2 is fixedly installed on the base plate 1 , and the object stage 3 is fixedly installed on the top surface of the piezoelectric positioning stage 2 . The pre-tightening mechanism includes a first pre-tigh...
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